Chin. J. Semicond. > 1999, Volume 20 > Issue 12 > 1109-1114
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ECR Plasma CVD淀积介质膜折射率的神经网络模拟

李玉鉴 , 谭满清 , 茅冬生 and 陆建祖

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    Received: 19 August 2015 Revised: Online: Published: 01 December 1999

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      Article Navigation >  Journal of Semiconductors  > 1999  >  20(12): 1109-1114
      李玉鉴, 谭满清, 茅冬生, 陆建祖. ECR Plasma CVD淀积介质膜折射率的神经网络模拟[J]. 半导体学报(英文版), 1999, 20(12): 1109-1114.
      Citation:
      李玉鉴, 谭满清, 茅冬生, 陆建祖. ECR Plasma CVD淀积介质膜折射率的神经网络模拟[J]. 半导体学报(英文版), 1999, 20(12): 1109-1114.
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      • Received Date: 2015-08-19

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