Chin. J. Semicond. > 2002, Volume 23 > Issue 8 > 886-891
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光致抗蚀剂曝光的虚膜插入模拟技术

范建兴 , 杨华中 and 汪蕙

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Key words: 光学传输矩阵, 抗蚀剂曝光, 光学薄膜计算

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    Received: 19 August 2015 Revised: Online: Published: 01 August 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(8): 886-891
      范建兴, 杨华中, 汪蕙. 光致抗蚀剂曝光的虚膜插入模拟技术[J]. 半导体学报(英文版), 2002, 23(8): 886-891.
      Citation:
      范建兴, 杨华中, 汪蕙. 光致抗蚀剂曝光的虚膜插入模拟技术[J]. 半导体学报(英文版), 2002, 23(8): 886-891.
      shu

      • Received Date: 2015-08-19

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