Chin. J. Semicond. > 1999, Volume 20 > Issue 2 > 107-112
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碳和氮原子在氧沉淀中的作用

刘培东 , 朱爱平 , 张锦心 , 李立本 and 阙端麟

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    Received: 20 August 2015 Revised: Online: Published: 01 February 1999

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      Article Navigation >  Journal of Semiconductors  > 1999  >  20(2): 107-112
      刘培东, 朱爱平, 张锦心, 李立本, 阙端麟. 碳和氮原子在氧沉淀中的作用[J]. 半导体学报(英文版), 1999, 20(2): 107-112.
      Citation:
      刘培东, 朱爱平, 张锦心, 李立本, 阙端麟. 碳和氮原子在氧沉淀中的作用[J]. 半导体学报(英文版), 1999, 20(2): 107-112.
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      • Received Date: 2015-08-20

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