Chin. J. Semicond. > 1993, Volume 14 > Issue 1 > 21-27
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卧式MOCVD反应器内涡旋分布数值模拟

金希卓 , 丛志先 and 刘明登

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(1): 21-27
      金希卓, 丛志先, 刘明登. 卧式MOCVD反应器内涡旋分布数值模拟[J]. 半导体学报(英文版), 1993, 14(1): 21-27.
      Citation:
      金希卓, 丛志先, 刘明登. 卧式MOCVD反应器内涡旋分布数值模拟[J]. 半导体学报(英文版), 1993, 14(1): 21-27.
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      • Received Date: 2015-08-20

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