Chin. J. Semicond. > 1997, Volume 18 > Issue 5 > 337-343
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气氛掺氮直拉硅单晶中氮关施主的光热电离光谱研究

张溪文 , 阙端麟 , 石晓红 and 沈学础

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    Received: 19 August 2015 Revised: Online: Published: 01 May 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(5): 337-343
      张溪文, 阙端麟, 石晓红, 沈学础. 气氛掺氮直拉硅单晶中氮关施主的光热电离光谱研究[J]. 半导体学报(英文版), 1997, 18(5): 337-343.
      Citation:
      张溪文, 阙端麟, 石晓红, 沈学础. 气氛掺氮直拉硅单晶中氮关施主的光热电离光谱研究[J]. 半导体学报(英文版), 1997, 18(5): 337-343.
      shu

      • Received Date: 2015-08-19

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