Chin. J. Semicond. > 1992, Volume 13 > Issue 11 > 661-667
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分子束外延中硅衬底热应力产生缺陷的研究

盛篪 , 樊永良 , 俞鸣人 , 张翔九 , 孙恒慧 and 段晓峰

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1992

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      Article Navigation >  Journal of Semiconductors  > 1992  >  13(11): 661-667
      盛篪, 樊永良, 俞鸣人, 张翔九, 孙恒慧, 段晓峰. 分子束外延中硅衬底热应力产生缺陷的研究[J]. 半导体学报(英文版), 1992, 13(11): 661-667.
      Citation:
      盛篪, 樊永良, 俞鸣人, 张翔九, 孙恒慧, 段晓峰. 分子束外延中硅衬底热应力产生缺陷的研究[J]. 半导体学报(英文版), 1992, 13(11): 661-667.
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      • Received Date: 2015-08-19

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