Chin. J. Semicond. > 1996, Volume 17 > Issue 6 > 464-469
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低能量Ar~＋背面轰击对晶体管特性的影响

李观启，曾绍鸿，黄美浅

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    Received: 18 August 2015 Revised: Online: Published: 01 June 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(6): 464-469
      李观启，曾绍鸿，黄美浅. 低能量Ar~＋背面轰击对晶体管特性的影响[J]. 半导体学报(英文版), 1996, 17(6): 464-469.
      Citation:
      李观启，曾绍鸿，黄美浅. 低能量Ar~＋背面轰击对晶体管特性的影响[J]. 半导体学报(英文版), 1996, 17(6): 464-469.
      shu

      • Received Date: 2015-08-18

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