Chin. J. Semicond. > 1986, Volume 7 > Issue 6 > 596-601
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用AES和XPS技术研究半绝缘多晶硅薄膜

王云珍 and 蒋长根

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    Received: 20 August 2015 Revised: Online: Published: 01 June 1986

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      Article Navigation >  Journal of Semiconductors  > 1986  >  7(6): 596-601
      王云珍, 蒋长根. 用AES和XPS技术研究半绝缘多晶硅薄膜[J]. 半导体学报(英文版), 1986, 7(6): 596-601.
      Citation:
      王云珍, 蒋长根. 用AES和XPS技术研究半绝缘多晶硅薄膜[J]. 半导体学报(英文版), 1986, 7(6): 596-601.
      shu

      • Received Date: 2015-08-20

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