Citation: |
谭满清, 茅冬生. ECR Plasma CVD法淀积808nm大功率半导体激光器光学膜工艺研究[J]. 半导体学报(英文版), 1999, 20(7): 589-592.
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Received: 20 August 2015 Revised: Online: Published: 01 July 1999
Citation: |
谭满清, 茅冬生. ECR Plasma CVD法淀积808nm大功率半导体激光器光学膜工艺研究[J]. 半导体学报(英文版), 1999, 20(7): 589-592.
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