Chin. J. Semicond. > 1986, Volume 7 > Issue 1 > 18-23
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多晶硅晶粒度的X光衍射增宽傅里叶分析

林振金 , 刘立竹 , 龚德纯 , 来永春 and 王世润

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1986

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      Article Navigation >  Journal of Semiconductors  > 1986  >  7(1): 18-23
      林振金, 刘立竹, 龚德纯, 来永春, 王世润. 多晶硅晶粒度的X光衍射增宽傅里叶分析[J]. 半导体学报(英文版), 1986, 7(1): 18-23.
      Citation:
      林振金, 刘立竹, 龚德纯, 来永春, 王世润. 多晶硅晶粒度的X光衍射增宽傅里叶分析[J]. 半导体学报(英文版), 1986, 7(1): 18-23.
      shu

      • Received Date: 2015-08-20

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