| Citation: |
Duan Fei, Jiao Jiwei, Wang Yucai, Zhang Ying, Mi Binwei, Li Jinpeng, Qian Qing, Wang Yuelin. A Novel Micromachined x-Axis Tuning Fork Gyroscope Based on "8-Beams/Proofmass" Structure[J]. Journal of Semiconductors, 2007, 28(10): 1630-1635.
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Duan F, Jiao J W, Wang Y C, Zhang Y, Mi B W, Li J P, Qian Q, Wang Y L. A Novel Micromachined x-Axis Tuning Fork Gyroscope Based on \'8-Beams/Proofmass\' Structure[J]. Chin. J. Semicond., 2007, 28(10): 1630.
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A Novel Micromachined x-Axis Tuning Fork Gyroscope Based on "8-Beams/Proofmass" Structure
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Abstract
A novel x-axis tuning fork MEMS gyroscope with "8-beams/proofmass" structure for detecting the Coriolis effect is presented.Compared with the common single-plane beams,the 8 vertical beams,symmetrically located at the top and bottom sides,more stably suspend the large thick proof mass,resulting in large capacitance variation and low mechanical noise.Bulk-micromachining technology is applied to obtain the large proof mass and twin dual beams.During the fabrication process,the dimensions of the beams are precisely confined by thermal oxide-protected limit trench sidewalls and the extremely slowly etched (111)-planes;therefore a small mismatch of less than 30Hz is achieved before tuning.Initial testing shows a sensitivity of 0.15mV/(°/s) and a rate resolution around 0.1°/s under atmosphere pressure.-
Keywords:
- MEMS,
- x-axis gyroscope,
- tuning fork gyroscope,
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References
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Proportional views
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