Chin. J. Semicond. > 2003, Volume 24 > Issue 8 > 861-865
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阵列式微机械悬臂梁的研制及其特性分析

于晓梅 , 张大成 , 李婷 , 王小宝 , 阮勇 and 杜先锋

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Key words: 悬臂梁, 噪声, 灵敏度, 最小可探测位移

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    Received: 20 August 2015 Revised: Online: Published: 01 August 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(8): 861-865
      于晓梅, 张大成, 李婷, 王小宝, 阮勇, 杜先锋. 阵列式微机械悬臂梁的研制及其特性分析[J]. 半导体学报(英文版), 2003, 24(8): 861-865.
      Citation:
      于晓梅, 张大成, 李婷, 王小宝, 阮勇, 杜先锋. 阵列式微机械悬臂梁的研制及其特性分析[J]. 半导体学报(英文版), 2003, 24(8): 861-865.
      shu

      • Received Date: 2015-08-20

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