Chin. J. Semicond. > 1995, Volume 16 > Issue 9 > 677-682
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符合法弹性前冲测量重掺锑硅中氧含量

徐岳生，刘彩池，李养贤，朱则韶，王红梅，韦伦存

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1995

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      Article Navigation >  Journal of Semiconductors  > 1995  >  16(9): 677-682
      徐岳生，刘彩池，李养贤，朱则韶，王红梅，韦伦存. 符合法弹性前冲测量重掺锑硅中氧含量[J]. 半导体学报(英文版), 1995, 16(9): 677-682.
      Citation:
      徐岳生，刘彩池，李养贤，朱则韶，王红梅，韦伦存. 符合法弹性前冲测量重掺锑硅中氧含量[J]. 半导体学报(英文版), 1995, 16(9): 677-682.
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      • Received Date: 2015-08-19

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