Chin. J. Semicond. > 1993, Volume 14 > Issue 1 > 56-59
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高温氢气氛对SIMOX/SOI结构的损伤

李金华 , 林成鲁 , 林梓鑫 , 薛才广 and 邹世昌

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(1): 56-59
      李金华, 林成鲁, 林梓鑫, 薛才广, 邹世昌. 高温氢气氛对SIMOX/SOI结构的损伤[J]. 半导体学报(英文版), 1993, 14(1): 56-59.
      Citation:
      李金华, 林成鲁, 林梓鑫, 薛才广, 邹世昌. 高温氢气氛对SIMOX/SOI结构的损伤[J]. 半导体学报(英文版), 1993, 14(1): 56-59.
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      • Received Date: 2015-08-20

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