Chin. J. Semicond. > 1996, Volume 17 > Issue 5 > 370-375
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用常压CVD方法制备的氟掺杂的绒面SnO_2膜的电导特性

张德恒，马洪磊，温卓尚

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    Received: 18 August 2015 Revised: Online: Published: 01 May 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(5): 370-375
      张德恒，马洪磊，温卓尚. 用常压CVD方法制备的氟掺杂的绒面SnO_2膜的电导特性[J]. 半导体学报(英文版), 1996, 17(5): 370-375.
      Citation:
      张德恒，马洪磊，温卓尚. 用常压CVD方法制备的氟掺杂的绒面SnO_2膜的电导特性[J]. 半导体学报(英文版), 1996, 17(5): 370-375.
      shu

      • Received Date: 2015-08-18

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