| Citation: |
Guo Chunsheng, Li Xiuyu, Li Zhiguo, Wu Yuehua. Reservoir Effect in Multi-Layer Metal System[J]. Journal of Semiconductors, 2007, 28(S1): 452-456.
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Guo C S, Li X Y, Li Z G, Wu Y H. Reservoir Effect in Multi-Layer Metal System[J]. Chin. J. Semicond., 2007, 28(S1): 452.
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Reservoir Effect in Multi-Layer Metal System
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Abstract
Metal iron reservoirs in multi·layer metal system with W via have great effects on the electro-migration lifetime. In this study，the sample with different reservoir structure was designed for the electro-migration test.The effect of reservoir area，via displace，amount and size on electro-migration lifetime was concluded·and reservoir area play a significant role a- mong all factors.-
Keywords:
- interconnects,
- reservoir effect,
- electro-migration
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References
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Proportional views
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