Chin. J. Semicond. > 2001, Volume 22 > Issue 4 > 398-401
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低压金属有机化合物气相外延生长的 (Al_x Ga_(1-x))_(0.51)In_(0.49)P折射率测量(英文)

廉鹏 , 马骁宇 , 张广泽 and 陈良惠

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Key words: 金属有机化合物气相外延, 折射率, 测量, AlGaInP

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    Received: 20 August 2015 Revised: Online: Published: 01 April 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(4): 398-401
      廉鹏, 马骁宇, 张广泽, 陈良惠. 低压金属有机化合物气相外延生长的 (Al_x Ga_(1-x))_(0.51)In_(0.49)P折射率测量(英文)[J]. 半导体学报(英文版), 2001, 22(4): 398-401.
      Citation:
      廉鹏, 马骁宇, 张广泽, 陈良惠. 低压金属有机化合物气相外延生长的 (Al_x Ga_(1-x))_(0.51)In_(0.49)P折射率测量(英文)[J]. 半导体学报(英文版), 2001, 22(4): 398-401.
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      • Received Date: 2015-08-20

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