Citation: |
欧阳斯可, 汪涛, 戴永兵, 吴建生, 何贤昶, 沈荷生. 微波等离子体退火制备CoSi_2薄膜[J]. 半导体学报(英文版), 2004, 25(8): 981-985.
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Proportional views
Key words: 金属硅化物, 钴, 固相反应, 微波等离子体
Article views: 2564 Times PDF downloads: 1227 Times Cited by: 0 Times
Received: 19 August 2015 Revised: Online: Published: 01 August 2004
Citation: |
欧阳斯可, 汪涛, 戴永兵, 吴建生, 何贤昶, 沈荷生. 微波等离子体退火制备CoSi_2薄膜[J]. 半导体学报(英文版), 2004, 25(8): 981-985.
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