Chin. J. Semicond. > 1991, Volume 12 > Issue 9 > 561-565
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实现SOI结构的ELO方法中SiO_2上Si多晶核的形成与抑制

阎春辉 , 刘明登 , 全宝富 , 朱袁正 , 张旭光 and 王阳元

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1991

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      Article Navigation >  Journal of Semiconductors  > 1991  >  12(9): 561-565
      阎春辉, 刘明登, 全宝富, 朱袁正, 张旭光, 王阳元. 实现SOI结构的ELO方法中SiO_2上Si多晶核的形成与抑制[J]. 半导体学报(英文版), 1991, 12(9): 561-565.
      Citation:
      阎春辉, 刘明登, 全宝富, 朱袁正, 张旭光, 王阳元. 实现SOI结构的ELO方法中SiO_2上Si多晶核的形成与抑制[J]. 半导体学报(英文版), 1991, 12(9): 561-565.
      shu

      • Received Date: 2015-08-19

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