Chin. J. Semicond. > 1994, Volume 15 > Issue 1 > 48-54
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离子注入形成SIMOX与SIMNI结构的计算机模拟

施左宇，林成鲁，朱文化，邹世昌

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    Received: 18 August 2015 Revised: Online: Published: 01 January 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(1): 48-54
      施左宇，林成鲁，朱文化，邹世昌. 离子注入形成SIMOX与SIMNI结构的计算机模拟[J]. 半导体学报(英文版), 1994, 15(1): 48-54.
      Citation:
      施左宇，林成鲁，朱文化，邹世昌. 离子注入形成SIMOX与SIMNI结构的计算机模拟[J]. 半导体学报(英文版), 1994, 15(1): 48-54.
      shu

      • Received Date: 2015-08-18

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