Chin. J. Semicond. > 1993, Volume 14 > Issue 2 > 83-87
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钛在硅浅结互连中引进深能级的研究

李秀琼 , 卢励吾 and 陈维德

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    Received: 20 August 2015 Revised: Online: Published: 01 February 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(2): 83-87
      李秀琼, 卢励吾, 陈维德. 钛在硅浅结互连中引进深能级的研究[J]. 半导体学报(英文版), 1993, 14(2): 83-87.
      Citation:
      李秀琼, 卢励吾, 陈维德. 钛在硅浅结互连中引进深能级的研究[J]. 半导体学报(英文版), 1993, 14(2): 83-87.
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      • Received Date: 2015-08-20

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