Citation: |
Zhao Chuanzhen, Tang Jiyu, Wen Yuhua, Wu Liangzhen, Kong Yunting. Physical Mechanism of the Built-In Electric Field for SiGe HBT with Heavy p-Doping[J]. Journal of Semiconductors, 2007, 28(6): 873-877.
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Zhao C Z, Tang J Y, Wen Y H, Wu L Z, Kong Y T. Physical Mechanism of the Built-In Electric Field for SiGe HBT with Heavy p-Doping[J]. Chin. J. Semicond., 2007, 28(6): 873.
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Physical Mechanism of the Built-In Electric Field for SiGe HBT with Heavy p-Doping
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Abstract
A model for the built-in electric field in the base is developed and calculated analytically.The model is suitable for a base with a Gaussian doping distribution and different Ge profiles (e.g.,triangle,box-triangle).A new formula for the valence band effective states is obtained,and the effect of the conduction band effective states on the built-in electric field is considered for the first time.It is found that the effect of the Ge fraction on the built-in electric field is larger than that of impurities.When the Ge fraction profile is triangular,the built-in electric field increases gradually from emission to collector with the total Ge fraction.At a given location x,the built-in electric field becomes larger and larger with the increasing of the total Ge fraction.When the Ge fraction profile is box-triangular,the built-in electric field increases from emission junction to collector for a given x1 and a given Ge fraction yc.For an invariable Ge fraction profile,the built-in electric field is nearly invariable.For a linearly graded Ge fraction profile,the built-in electric field becomes larger and larger with the increasing of x1.In addition,there is a sharp drop near x1. -
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