Citation: |
王新柱, 徐秋霞, 钱鹤, 申作成, 欧文. 深亚微米隔离技术——浅沟槽隔离工艺[J]. 半导体学报(英文版), 2002, 23(3): 323-329.
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References
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Proportional views
Key words: 浅沟槽隔离, 化学机械平坦化, Kink效应, 反窄宽度效应
Article views: 2898 Times PDF downloads: 1561 Times Cited by: 0 Times
Received: 19 August 2015 Revised: Online: Published: 01 March 2002
Citation: |
王新柱, 徐秋霞, 钱鹤, 申作成, 欧文. 深亚微米隔离技术——浅沟槽隔离工艺[J]. 半导体学报(英文版), 2002, 23(3): 323-329.
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