Chin. J. Semicond. > 1987, Volume 8 > Issue 6 > 665-669
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硅中注铅的连续CO_2激光退火行为

殷士端 , 张敬平 , 顾诠 and 陆珉华

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    Received: 19 August 2015 Revised: Online: Published: 01 June 1987

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      Article Navigation >  Journal of Semiconductors  > 1987  >  8(6): 665-669
      殷士端, 张敬平, 顾诠, 陆珉华. 硅中注铅的连续CO_2激光退火行为[J]. 半导体学报(英文版), 1987, 8(6): 665-669.
      Citation:
      殷士端, 张敬平, 顾诠, 陆珉华. 硅中注铅的连续CO_2激光退火行为[J]. 半导体学报(英文版), 1987, 8(6): 665-669.
      shu

      • Received Date: 2015-08-19

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