Chin. J. Semicond. > 2000, Volume 21 > Issue 11 > 1086-1091
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C~+注入Si形成SiC/Si异质结构的椭偏光谱

阳生红 , 李辉遒 , 莫党 , 陈第虎 and 黄世平

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Key words: 椭偏光谱, C~+注入, SiC, 异质结构

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    Received: 20 August 2015 Revised: Online: Published: 01 November 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(11): 1086-1091
      阳生红, 李辉遒, 莫党, 陈第虎, 黄世平. C~+注入Si形成SiC/Si异质结构的椭偏光谱[J]. 半导体学报(英文版), 2000, 21(11): 1086-1091.
      Citation:
      阳生红, 李辉遒, 莫党, 陈第虎, 黄世平. C~+注入Si形成SiC/Si异质结构的椭偏光谱[J]. 半导体学报(英文版), 2000, 21(11): 1086-1091.
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      • Received Date: 2015-08-20

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