Chin. J. Semicond. > 1993, Volume 14 > Issue 8 > 513-516
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快速热退火硅中微缺陷分析

徐立 , 钱佩信 and 李志坚

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    Received: 20 August 2015 Revised: Online: Published: 01 August 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(8): 513-516
      徐立, 钱佩信, 李志坚. 快速热退火硅中微缺陷分析[J]. 半导体学报(英文版), 1993, 14(8): 513-516.
      Citation:
      徐立, 钱佩信, 李志坚. 快速热退火硅中微缺陷分析[J]. 半导体学报(英文版), 1993, 14(8): 513-516.
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      • Received Date: 2015-08-20

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