Chin. J. Semicond. > 1982, Volume 3 > Issue 2 > 89-94

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用C-V法同时测量半导体中深中心和浅杂质的浓度分布

秦国刚 , 杜永昌 and 张玉峰

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    Received: 20 August 2015 Revised: Online: Published: 01 February 1982

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      秦国刚, 杜永昌, 张玉峰. 用C-V法同时测量半导体中深中心和浅杂质的浓度分布[J]. 半导体学报(英文版), 1982, 3(2): 89-94.
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      秦国刚, 杜永昌, 张玉峰. 用C-V法同时测量半导体中深中心和浅杂质的浓度分布[J]. 半导体学报(英文版), 1982, 3(2): 89-94.

      • Received Date: 2015-08-20

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