Chin. J. Semicond. > 2001, Volume 22 > Issue 4 > 465-468
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微机械热对流加速度计

李立杰 and 梁春广

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Key words: 热对流, 加速度计, 微机械

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    Received: 20 August 2015 Revised: Online: Published: 01 April 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(4): 465-468
      李立杰, 梁春广. 微机械热对流加速度计[J]. 半导体学报(英文版), 2001, 22(4): 465-468.
      Citation:
      李立杰, 梁春广. 微机械热对流加速度计[J]. 半导体学报(英文版), 2001, 22(4): 465-468.
      shu

      • Received Date: 2015-08-20

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