Chin. J. Semicond. > 1993, Volume 14 > Issue 10 > 612-618
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Co-Si多层膜在稳态热退火中的固相界面反应

顾诠 , 陈维德 and 许振嘉

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    Received: 20 August 2015 Revised: Online: Published: 01 October 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(10): 612-618
      顾诠, 陈维德, 许振嘉. Co-Si多层膜在稳态热退火中的固相界面反应[J]. 半导体学报(英文版), 1993, 14(10): 612-618.
      Citation:
      顾诠, 陈维德, 许振嘉. Co-Si多层膜在稳态热退火中的固相界面反应[J]. 半导体学报(英文版), 1993, 14(10): 612-618.
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      • Received Date: 2015-08-20

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