Chin. J. Semicond. > 2003, Volume 24 > Issue 10 > 1089-1092
|

CONTENTS

半导体激光器阵列隔离槽的湿法腐蚀

辛国锋 , 陈国鹰 , 冯荣珠 , 花吉珍 , 安振峰 , 牛健 and 赵卫青

+ Author Affiliations

PDF

Key words: 化学湿法腐蚀, 半导体激光器阵列, 扫描电子显微镜

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2692 Times PDF downloads: 895 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 October 2003

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2003  >  24(10): 1089-1092
      辛国锋, 陈国鹰, 冯荣珠, 花吉珍, 安振峰, 牛健, 赵卫青. 半导体激光器阵列隔离槽的湿法腐蚀[J]. 半导体学报(英文版), 2003, 24(10): 1089-1092.
      Citation:
      辛国锋, 陈国鹰, 冯荣珠, 花吉珍, 安振峰, 牛健, 赵卫青. 半导体激光器阵列隔离槽的湿法腐蚀[J]. 半导体学报(英文版), 2003, 24(10): 1089-1092.
      shu

      • Received Date: 2015-08-20

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return