Chin. J. Semicond. > 2000, Volume 21 > Issue 4 > 400-403
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基于神经网络方法预测薄膜的厚度

于丽娟 , 朱长纯 and 陈晓宁

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Key words: 薄膜, 厚度, 预测, 神经网络

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    Received: 20 August 2015 Revised: Online: Published: 01 April 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(4): 400-403
      于丽娟, 朱长纯, 陈晓宁. 基于神经网络方法预测薄膜的厚度[J]. 半导体学报(英文版), 2000, 21(4): 400-403.
      Citation:
      于丽娟, 朱长纯, 陈晓宁. 基于神经网络方法预测薄膜的厚度[J]. 半导体学报(英文版), 2000, 21(4): 400-403.
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      • Received Date: 2015-08-20

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