Chin. J. Semicond. > 1995, Volume 16 > Issue 4 > 291-295
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自对准硅化物CMOS／SOI技术研究

奚雪梅，徐立，武国英，李映雪，王阳元

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    Received: 19 August 2015 Revised: Online: Published: 01 April 1995

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      Article Navigation >  Journal of Semiconductors  > 1995  >  16(4): 291-295
      奚雪梅，徐立，武国英，李映雪，王阳元. 自对准硅化物CMOS／SOI技术研究[J]. 半导体学报(英文版), 1995, 16(4): 291-295.
      Citation:
      奚雪梅，徐立，武国英，李映雪，王阳元. 自对准硅化物CMOS／SOI技术研究[J]. 半导体学报(英文版), 1995, 16(4): 291-295.
      shu

      • Received Date: 2015-08-19

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