Chin. J. Semicond. > 1996, Volume 17 > Issue 9 > 659-663
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扫描电子声显微镜在半导体材料分析中的应用

张冰阳，江福明，惠森兴，杨阳，姚烈，殷庆瑞

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    Received: 18 August 2015 Revised: Online: Published: 01 September 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(9): 659-663
      张冰阳，江福明，惠森兴，杨阳，姚烈，殷庆瑞. 扫描电子声显微镜在半导体材料分析中的应用[J]. 半导体学报(英文版), 1996, 17(9): 659-663.
      Citation:
      张冰阳，江福明，惠森兴，杨阳，姚烈，殷庆瑞. 扫描电子声显微镜在半导体材料分析中的应用[J]. 半导体学报(英文版), 1996, 17(9): 659-663.
      shu

      • Received Date: 2015-08-18

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