Chin. J. Semicond. > 2002, Volume 23 > Issue 3 > 225-237

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硅集成电路光刻技术的发展与挑战

王阳元 and 康晋锋

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Key words: 光刻, 集成电路, 微电子

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    Received: 19 August 2015 Revised: Online: Published: 01 March 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(3): 225-237
      王阳元, 康晋锋. 硅集成电路光刻技术的发展与挑战[J]. 半导体学报(英文版), 2002, 23(3): 225-237.
      Citation:
      王阳元, 康晋锋. 硅集成电路光刻技术的发展与挑战[J]. 半导体学报(英文版), 2002, 23(3): 225-237.
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      • Received Date: 2015-08-19

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