Chin. J. Semicond. > 1996, Volume 17 > Issue 12 > 923-927
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（100）Si在KOH中各向异性腐蚀的凸角补偿新方法

张庆鑫，刘理天，李志坚

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    Received: 18 August 2015 Revised: Online: Published: 01 December 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(12): 923-927
      张庆鑫，刘理天，李志坚. （100）Si在KOH中各向异性腐蚀的凸角补偿新方法[J]. 半导体学报(英文版), 1996, 17(12): 923-927.
      Citation:
      张庆鑫，刘理天，李志坚. （100）Si在KOH中各向异性腐蚀的凸角补偿新方法[J]. 半导体学报(英文版), 1996, 17(12): 923-927.
      shu

      • Received Date: 2015-08-18

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