Citation: |
张庆鑫,刘理天,李志坚. (100)Si在KOH中各向异性腐蚀的凸角补偿新方法[J]. 半导体学报(英文版), 1996, 17(12): 923-927.
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Received: 18 August 2015 Revised: Online: Published: 01 December 1996
Citation: |
张庆鑫,刘理天,李志坚. (100)Si在KOH中各向异性腐蚀的凸角补偿新方法[J]. 半导体学报(英文版), 1996, 17(12): 923-927.
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