Chin. J. Semicond. > 2003, Volume 24 > Issue 11 > 1196-1119

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Key words: 微机械, 光开关, 扭臂, 倾斜下电极

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    Received: 20 August 2015 Revised: Online: Published: 01 November 2003

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      董玮, 阮圣平, 张歆东, 刘彩霞, 贾翠萍, 潘建旋, 张龙, 孙东明, 纪平, 陈维友. 具有倾斜下电极的扭臂驱动结构的设计与制作[J]. 半导体学报(英文版), 2003, 24(11): 1196-1119.
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      董玮, 阮圣平, 张歆东, 刘彩霞, 贾翠萍, 潘建旋, 张龙, 孙东明, 纪平, 陈维友. 具有倾斜下电极的扭臂驱动结构的设计与制作[J]. 半导体学报(英文版), 2003, 24(11): 1196-1119.

      • Received Date: 2015-08-20

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