Chin. J. Semicond. > 2003, Volume 24 > Issue 11 > 1196-1119
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具有倾斜下电极的扭臂驱动结构的设计与制作

董玮 , 阮圣平 , 张歆东 , 刘彩霞 , 贾翠萍 , 潘建旋 , 张龙 , 孙东明 , 纪平 and 陈维友

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Key words: 微机械, 光开关, 扭臂, 倾斜下电极

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    Received: 20 August 2015 Revised: Online: Published: 01 November 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(11): 1196-1119
      董玮, 阮圣平, 张歆东, 刘彩霞, 贾翠萍, 潘建旋, 张龙, 孙东明, 纪平, 陈维友. 具有倾斜下电极的扭臂驱动结构的设计与制作[J]. 半导体学报(英文版), 2003, 24(11): 1196-1119.
      Citation:
      董玮, 阮圣平, 张歆东, 刘彩霞, 贾翠萍, 潘建旋, 张龙, 孙东明, 纪平, 陈维友. 具有倾斜下电极的扭臂驱动结构的设计与制作[J]. 半导体学报(英文版), 2003, 24(11): 1196-1119.
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      • Received Date: 2015-08-20

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