| Citation: |
Zuo Yuhua, Cai Xiao, Mao Rongwei, Wang Qiming. Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band[J]. Journal of Semiconductors, 2005, 26(11): 2218-2222.
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Zuo Y H, Cai X, Mao R W, Wang Q M. Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band[J]. Chin. J. Semicond., 2005, 26(11): 2218.
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Fabrication of a Novel Si-Based Thermo-Optical Tunable Flat-Top Filter with Narrow Band
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Abstract
Based on a step-type F-P cavity structure,a novel all Si-based thermo-optical tunable flat-top filter with narrow band is fabricated,using our patent SOR(silicon-on-reflector) bonding technology.The device demonstrates a flat-top width of 2nm,3dB band of 4.4nm,FSR(free spectra range) of 8.5nm,and a red-shift of the transmittance peak of 33nm under the applied voltage.-
Keywords:
- flat-top filter,
- thermo-optical tunability,
- Si-base,
- narrow band
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References
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Proportional views
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