Chin. J. Semicond. > 1993, Volume 14 > Issue 1 > 6-12
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射频等离子体沉积类金刚石膜微结构的表征

杨伟毅

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(1): 6-12
      杨伟毅. 射频等离子体沉积类金刚石膜微结构的表征[J]. 半导体学报(英文版), 1993, 14(1): 6-12.
      Citation:
      杨伟毅. 射频等离子体沉积类金刚石膜微结构的表征[J]. 半导体学报(英文版), 1993, 14(1): 6-12.
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      • Received Date: 2015-08-20

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