Chin. J. Semicond. > 2005, Volume 26 > Issue 7 > 1369-1373
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电容式绝对压力传感器的改进模型及温度特性分析

刘娜 , 黄庆安 , 秦明 and 周闵新

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Key words: 电容式绝对压力传感器, 改进模型, 残余气体, 温度漂移, 灵敏度

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    Received: 18 August 2015 Revised: Online: Published: 01 July 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(7): 1369-1373
      刘娜, 黄庆安, 秦明, 周闵新. 电容式绝对压力传感器的改进模型及温度特性分析[J]. 半导体学报(英文版), 2005, 26(7): 1369-1373.
      Citation:
      刘娜, 黄庆安, 秦明, 周闵新. 电容式绝对压力传感器的改进模型及温度特性分析[J]. 半导体学报(英文版), 2005, 26(7): 1369-1373.
      shu

      • Received Date: 2015-08-18

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