J. Semicond. > 2024, Volume 45 > Issue 12 > 121601
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REVIEWS

Recent advances and future prospects in tactile sensors for normal and shear force detection, decoupling, and applications

Jinrong Huang, Yuchen Guo, Yongchang Jiang, Feiyu Wang, Lijia Pan and Yi Shi

+ Author Affiliations

 Corresponding author: Lijia Pan, ljpan@nju.edu.cn; Yi Shi, yshi@nju.edu.cn

DOI: 10.1088/1674-4926/24080006

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Abstract: Human skin, through its complex mechanoreceptor system, possesses the exceptional ability to finely perceive and differentiate multimodal mechanical stimuli, forming the biological foundation for dexterous manipulation, environmental exploration, and tactile perception. Tactile sensors that emulate this sensory capability, particularly in the detection, decoupling, and application of normal and shear forces, have made significant strides in recent years. This review comprehensively examines the latest research advancements in tactile sensors for normal and shear force sensing, delving into the design and decoupling methods of multi-unit structures, multilayer encapsulation structures, and bionic structures. It analyzes the advantages and disadvantages of various sensing principles, including piezoresistive, capacitive, and self-powered mechanisms, and evaluates their application potential in health monitoring, robotics, wearable devices, smart prosthetics, and human-machine interaction. By systematically summarizing current research progress and technical challenges, this review aims to provide forward-looking insights into future research directions, driving the development of electronic skin technology to ultimately achieve tactile perception capabilities comparable to human skin.

Key words: tactile sensors, shear force, force decoupling, e-skin



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Fig. 1.  (Color online) The flexible normal and shear tactile sensors with different structures, sensing mechanisms, materials and their applications.

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Fig. 2.  (Color online) The design of multi-unit structure. (a) The sensing unit is divided into two symmetrical parts[5]. (b) According to the center symmetry, the sensing unit is divided into three parts[57]. (c) Based on the four quadrants, the sensing unit is divided into four parts[44]. (d)−(f) According to the application scenarios, the sensing units are divided into five, eight or more parts[26, 58, 59].

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Fig. 3.  (Color online) Decoupling principle for multi-unit structures. (a) The initial state of the tactile sensors divided into four units according to the four quadrants. (b) Applying the normal force, the four units change in the same trend. (c) Applying the shear force along the X+ direction, the capacitance of U1 and U4 increases while the U2 and U3 capacitance values decrease. (d) Applying the shear force along the Y+ direction, the capacitance of U1 and U2 increases while the U3 and U4 capacitance values decrease.

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Fig. 4.  (Color online) The design of multi-layer and bionic structures. (a)−(c) Schematic diagram of a device adopting a multi-layer structure, where each layer from top to bottom is responsible for detecting normal and shear forces, respectively[10, 75, 76]. (d)−(f) Schematic representation of the bionic structures embedded in the bionic Merkel cell and Ruffini corpuscles clusters[2, 78].

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Fig. 5.  (Color online) The working principle and material design of normal and shear force tactile sensors. (a) Tactile sensors using the piezoresistive principle increase the contact area with increasing pressure, thus reducing resistance[25]. (b) Tactile sensors designed using the principle of piezocapacitance decrease the relative distance under normal force and decrease the relative area under shear force[26]. (c) and (d) Tactile sensors designed to utilize the triboelectric and piezoelectric show an increase in electrical charge transfer as the contact force increases[29, 88]. (e) Flexible tactile sensor based on fiber Bragg gratings (FBGs) for normal and shear force detection[32].

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Fig. 6.  (Color online) Application of normal and shear force tactile sensors. (a) Tactile sensors using the piezoresistive principle increase the contact area with increasing pressure, thus reducing resistance[99]. (b) Normal and shear force tactile sensors for sleep monitoring[58]. (c) and (d) Normal force and shear force tactile sensors are used to assist robotic grippers in industry and in life[37, 65]. (e) and (f) Normal force and shear force tactile sensors for car and game control[44, 66].

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Table 1.   Performance comparison of flexible normal force and shear force tactile sensors with different sensing mechanisms, structures, and functional materials.

Ref. Year Structure Force range Maximum sensitivity Principle Materials
Normal Shear Normal Shear
[24] 2024 Multi-unit 0−12 N 0−2.6 N 0.775 N−1 0.122 N−1 Piezoresistive PE/carbon black (CB)
[41] 2024 Multi-unit None None 0.435 V·N−1 1.694 V·N−1 Piezoresistive GR/AgNF/SR
[29] 2024 Multi-unit 0−10 N None 0°−360° 15° Triboelectric Silicone/Cu
[26] 2024 Multi-unit 2.2 N 0.8 N 2.77 mN·fF−1 0.23 mN·fF−1 Piezocapacitive Silicone/carbon
particles /EGaIn
[44] 2024 Multi-unit 0−8 N 0−3 N 1.5370 N−1 0.6960 N−1 Piezocapacitive PI nanofiber /PDMS
[75] 2024 Multi-layer 0−12 N 0.67 N 0.057 N−1 7.3° Piezoresistive
/piezocapacitive		 PDMS/AgNF/
GNP/nano-SiO2
[2] 2024 Bionic 150 kPa 0.5 N 5 × 10−5 kPa−1 6 × 10−4 N−1 Piezoresistive PI/Cr/Au
[61] 2023 Multi-unit 0−8 N 0−2 N 8000 N−1 4000 N−1 Piezocapacitive PVA/PDMS
[25] 2023 Multi-unit 0−3.5 N 0−1.5 N 58.097 N−1 36.137 N−1 Piezoresistive MWCNTs/PDMS/PI/
graphite nanosheets (GNS)
[60] 2023 Multi-unit 0−3 N 0−0.5 N 69.19% N−1 41.59% N−1 Piezocapacitive PDMS/Cr/Cu
[27] 2023 Multi-unit 0−14 N 0−6 N 0.693 N−1 0.551 N−1 Piezocapacitive GNPs/MWCNTs/PDMS
[62] 2023 Multi-unit 0−1.6 N None 0.47% N−1 1.8 % N−1 Piezocapacitive Ecoflex/CB
[63] 2023 Multi-unit 0−25 N 0−12.5 N 310.15 mV·N−1 50.82 mV·N−1 Magnetic
/piezoresistive		 Fe−Ga alloys/PDMS
[32] 2023 Multi-unit 0−2 N 0−2 N 14.18 pm·N−1 0.166 m·N−1 Optical Fiber brag gratings/silicone rubber
[57] 2023 Multi-unit 0−50 Pa 0−0.5 N 3.5 kPa−1 0.134 N−1 Piezocapacitive Ecoflex
[30] 2022 Multi-unit 1−15 N 0.05−0.4 N 2.97 mV·kPa−1 None Triboelectric CB/MXene/PDMS
[31] 2022 Multi-unit 0−1.1 N −1−1 N −0.2207 N−1 −0.1976 N−1 Optical Ecoflex/silicone
[64] 2022 Multi-unit 0−50 N 0−10 N 0.1 N 0.2 N Piezocapacitive CNTs/PDMS
[65] 2022 Multi-unit 0−0.6 N 0−0.8 N 90.39% N−1 56.47% N−1 Piezocapacitive Silica gel/PET
[66] 2022 Multi-unit 0−5 N 0−3 N 3 MPa−1 1 N−1 Piezocapacitive PI/graphene oxide (GO)
[67] 2022 Multi-unit 0−35 N 0−14 N 0.551N−1 0.404 N−1 Piezocapacitive Silver adhesive/PDMS/silicon rubber
[76] 2022 Multi-layer 0−25 kPa 0−1.5 N 3.78 kPa−1 0.1 N−1 Piezoresistive Ti/Au/PDMS
[69] 2022 Multi-layer 0−20 N 0−6 N 0.3 N 0.2 N Magnetic/
piezoresistive		 Piezoresistive film /Ecoflex
[71] 2021 Multi-unit 0−15 N 0−5.5 N 0.93687 V−1·N−1 1.5321 V−1·N−1 Piezoresistive Velostat/PDMS
[80] 2021 Multi-unit 0−3 N 0−1.6 N 50 nF·N−1 22 nF·N−1 Piezocapacitive Paper/PI
[37] 2021 Multi-layer 0−20 kPa None 0.097 N−1 16 mN Piezoresistive Graphene (GR)/PU
[70] 2021 Multi-unit 0−3 N 0−0.5 N 67.78% N−1 57.75% N−1 Piezocapacitive PDMS/PET
[72] 2021 Multi-unit 0−8 N 0−2.1 N 0.16 N−1 0.10 N−1 Piezocapacitive Cotton
[56] 2021 Multi-unit 0.1−18.8 kPa 0−0.90 N 6.33 kPa−1 1.28 N−1 Piezoresistive GR/PDMS
[59] 2021 Multi-unit 0.1−3 N −1−1 N 1.87 V·N−1 1.59 V·N−1 Piezoresistive Conductive rubber/PET/PDMS
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Table 2.   Elastic and functional components of materials commonly used in piezoresistive and piezocapacitive sensors.

Principle Elastic
component		 Functional
component
Piezoresistive PE, silicone rubber, PI, PDMS, Ecoflex, PU, PET CB, AgNF, Cr, Au, Ti, MWCNTs, GNS, Fe−Ga alloys, GR, conductive rubber
Piezocapacitive Silicone, PI, PI nanofiber, PDMS, PVA, Ecoflex, silica gel, PET Carbon particles, GNP, GO, nano-SiO2, Cr, Cu, EGaIn, MWCNTs, CB, silver adhesive, paper, cotton
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    Received: 03 September 2024 Revised: 26 September 2024 Online: Accepted Manuscript: 08 October 2024Uncorrected proof: 06 November 2024Published: 15 December 2024

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      Article Navigation >  Journal of Semiconductors  > 2024  >  45(12): 121601
      Jinrong Huang, Yuchen Guo, Yongchang Jiang, Feiyu Wang, Lijia Pan, Yi Shi. Recent advances and future prospects in tactile sensors for normal and shear force detection, decoupling, and applications[J]. Journal of Semiconductors, 2024, 45(12): 121601. doi: 10.1088/1674-4926/24080006 ****J R Huang, Y C Guo, Y C Jiang, F Y Wang, L J Pan, and Y Shi, Recent advances and future prospects in tactile sensors for normal and shear force detection, decoupling, and applications[J]. J. Semicond., 2024, 45(12), 121601 doi: 10.1088/1674-4926/24080006
      Citation:
      Jinrong Huang, Yuchen Guo, Yongchang Jiang, Feiyu Wang, Lijia Pan, Yi Shi. Recent advances and future prospects in tactile sensors for normal and shear force detection, decoupling, and applications[J]. Journal of Semiconductors, 2024, 45(12): 121601. doi: 10.1088/1674-4926/24080006 ****
      J R Huang, Y C Guo, Y C Jiang, F Y Wang, L J Pan, and Y Shi, Recent advances and future prospects in tactile sensors for normal and shear force detection, decoupling, and applications[J]. J. Semicond., 2024, 45(12), 121601 doi: 10.1088/1674-4926/24080006
      shu

      Recent advances and future prospects in tactile sensors for normal and shear force detection, decoupling, and applications

      DOI: 10.1088/1674-4926/24080006

      • Collaborative Innovation Center of Advanced Microstructures, School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China

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      • Jinrong Huang got his B.S. degree from the University of Science and Technology Beijing in 2017, and completed his M.S. degree from the University of Chinese Academy of Sciences in 2020. He is currently pursuing his Ph.D. in Electronic Science and Engineering at Nanjing University. His research interests are primarily in human-robot interaction and deep learning
      • Lijia Pan is a Full Professor of the School of Electronic Engineering, Nanjing University. He obtained his Ph.D. in polymer physics from University of Science and Technology of China. He was a visiting scholar to Prof. Zhenan Bao’s group at Stanford University. He obtained the National Natural Science Fund for Distinguished Young Scholars (2019−2023). His research interests include conducting polymers and skin-inspired electronic devices
      • Corresponding author: ljpan@nju.edu.cn; yshi@nju.edu.cn
      • Received Date: 2024-09-03
      • Revised Date: 2024-09-26
        • Available Online: 2024-10-08

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