Fig. 1.
(Color online) (a) Design and fabrication of the TEG, optical images of the TEG when it is (b) flat, (c) stretched, (d) bent, and (e) twisted.
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Journal of Semiconductors
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2026
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| Citation: |
Yanlong Li, Hao Sun, Zhao Zhao, Yingli Shi, Guozhen Shen. Experimental and simulated studies on thin-film thermoelectric generator insensitive to tensile strain[J]. Journal of Semiconductors, 2026, In Press. doi: 10.1088/1674-4926/25110021
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Y L Li, H Sun, Z Zhao, Y L Shi, and G Z Shen, Experimental and simulated studies on thin-film thermoelectric generator insensitive to tensile strain[J]. J. Semicond., 2026, accepted doi: 10.1088/1674-4926/25110021
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Experimental and simulated studies on thin-film thermoelectric generator insensitive to tensile strain
DOI: 10.1088/1674-4926/25110021
CSTR: 32376.14.1674-4926.25110021
More Information-
Yanlong Li got his Bs from Anhui University in 2024. Now he is a postgraduate student at Beijing Institute of Technology. His research focuses on flexible sensing and thermal control -
Hao Sun got his Bs from Dalian University of Technology in 2025. Now he is a postgraduate student at Beijing Institute of Technology. His research focuses on flexible sensing and thermal control -
Zhao Zhao got his Ph.D. degree from Beihang University in 2022 and his Master degree in 2018 from Beijing University of Technology, and he obtained his B.S. degree in 2015 from Ocean University of China. He is now working at the China Special Equipment Inspection and Research Institute. His current research interests focus on flexible electronics, heat conduction and vibration analysis -
Yingli Shi got his Ph.D. degree from Beihang University in 2020. He is currently an associate researcher / assistant professor at the School of Integrated Circuits and Electronics, Beijing Institute of Technology (BIT). His current research focuses on flexible integrated sensing and communication, and thermal management devices -
Guozhen Shen received his PhD degree in Chemistry from the University of Science and Technology of China. He is currently a professor at the School of Integrated Circuits and Electronics, Beijing Institute of Technology (BIT), and the director of the Institute of Flexible Electronics and Intelligent Manufacturing. Before joining BIT, he worked at Hanyang University (Korea), National Institute for Materials Science (Japan), University of Southern California (US), and Huazhong University of Science and Technology (China), the Institute of Semiconductors, CAS (China). His current research focuses on flexible electronic devices for artificial intelligence and healthcare monitoring - Corresponding author: zhaozhao@csei.org.cn; yingli.shi@bit.edu.cn; gzshen@bit.edu.cn
- Revised Date: 2025-12-26 Available Online: 2026-01-31
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Abstract
Thermoelectric power generation has attracted significant interest for its capability to directly convert thermal energy into electricity. Among various configurations, thin-film thermoelectric generators (TEGs) stand out due to their lightweight nature and facile integration, offering promising applications in waste heat recovery and wearable electronics. However, the performance of such devices under complex mechanical conditions, particularly under biaxial tensile strain, remains underexplored. In this work, we designed and fabricated a thin-film TEG insensitive to tensile strain and performed a parametric analysis using validated 3D numerical simulations to evaluate the effects of environmental conditions, material properties, and geometric parameters. Notably, the designed device maintained stable electrical performance under various biaxial tensile strains. Owing to its miniature and thin profile, variations in any component of the generator significantly affected its electrical performance. The results indicated that reduced thermal conductivity of the substrate and Ecoflex layer, as well as a thinner substrate, enhance the output voltage. Furthermore, longer thermoelectric legs within a certain range contributed to higher output voltage. Higher output voltage was more readily achieved when the inner radius length was close to the radius of the heat source. This work provides valuable insights for the development of high-performance compliant TEGs applicable in dynamic mechanical environments, such as complex stretching in the back and shoulder–elbow regions induced by human motion. -
References
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