J. Semicond. > 2011, Volume 32 > Issue 10 > 103003

SEMICONDUCTOR MATERIALS

Young’s modulus determination of low-k porous films by wide-band DCC/LD LSAW

Bai Maosen, Fu Xing, Dante Dorantes, Jin Baoyin and Hu Xiaotang

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DOI: 10.1088/1674-4926/32/10/103003

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Abstract: Low-k interconnection is one of the key concepts in the development of high-speed ultra-large-scale integrated (ULSI) circuits. To determine the Young’s modulus of ultra thin, low hardness and fragile low-k porous films more accurately, a wideband differential confocal configured laser detected and laser-generated surface acoustic wave (DCC/LD LSAW) detection system is developed. Based on the light deflection sensitivity detection principle, with a novel differential confocal configuration, this DCC/LD LSAW system extends the traditional laser generated surface acoustic wave (LSAW) detection system’s working frequency band, making the detected SAW signals less affected by the hard substrate and providing more information about the thin porous low-k film under test. Thus it has the ability to obtain more accurate measurement results. Its detecting principle is explained and a sample of porous silica film on Si (100) is tested. A procedure of fitting an experimental SAW dispersion curve with theoretical dispersion curves was carried out in the high frequency band newly achieved by the DCC/LD LSAW system. A comparison of the measurement results of the DCC/LD LSAW with those from the traditional LSAW shows that this newly developed DCC/LD LSAW can dramatically improve the Young’s modulus measuring accuracy of such porous low-k films.

Key words: nano-porous low-k film surface acoustic wave differential confocal Young’s modulus dispersion curve wide band

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    Received: 03 December 2014 Revised: 30 June 2011 Online: Published: 01 October 2011

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      Bai Maosen, Fu Xing, Dante Dorantes, Jin Baoyin, Hu Xiaotang. Young’s modulus determination of low-k porous films by wide-band DCC/LD LSAW[J]. Journal of Semiconductors, 2011, 32(10): 103003. doi: 10.1088/1674-4926/32/10/103003 ****Bai M S, Fu X, D Dorantes, Jin B Y, Hu X T. Young’s modulus determination of low-k porous films by wide-band DCC/LD LSAW[J]. J. Semicond., 2011, 32(10): 103003. doi:  10.1088/1674-4926/32/10/103003.
      Citation:
      Bai Maosen, Fu Xing, Dante Dorantes, Jin Baoyin, Hu Xiaotang. Young’s modulus determination of low-k porous films by wide-band DCC/LD LSAW[J]. Journal of Semiconductors, 2011, 32(10): 103003. doi: 10.1088/1674-4926/32/10/103003 ****
      Bai M S, Fu X, D Dorantes, Jin B Y, Hu X T. Young’s modulus determination of low-k porous films by wide-band DCC/LD LSAW[J]. J. Semicond., 2011, 32(10): 103003. doi:  10.1088/1674-4926/32/10/103003.

      Young’s modulus determination of low-k porous films by wide-band DCC/LD LSAW

      DOI: 10.1088/1674-4926/32/10/103003
      Funds:

      The National Natural Science Foundation of China (General Program, Key Program, Major Research Plan)

      • Received Date: 2014-12-03
      • Accepted Date: 2011-02-16
      • Revised Date: 2011-06-30
      • Published Date: 2011-09-20

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