Electrical characteristics of a vertical light emitting diode with n-type contacts on a selectively wet-etching roughened surface

Wang Liancheng; Guo Enqing; Liu Zhiqiang; Yi Xiaoyan; Wang Guohong

doi:10.1088/1674-4926/32/2/024009

J. Semicond. > 2011, Volume 32 > Issue 2 > 024009

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Electrical characteristics of a vertical light emitting diode with n-type contacts on a selectively wet-etching roughened surface

Wang Liancheng, Guo Enqing, Liu Zhiqiang, Yi Xiaoyan and Wang Guohong

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DOI: 10.1088/1674-4926/32/2/024009

Abstract: Low resistance and thermally stable n-type contacts to N-polar GaN are essentially important for vertical light emitting diodes (VLEDs). The electrical characteristics of VLEDs with n-type contacts on a roughened and flat N-polar surface have been compared. VLEDs with contacts deposited on a roughened surface exhibit lower leakage currents yet a higher operating voltage. Based on this, a new scheme by depositing metallization contacts on a selectively wet-etching roughened surface has been developed. Excellent electrical and optical characteristics have been achieved with this method. An aging test further confirmed its stability.

Key words: metallization contacts, wet etching, surface roughening

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Wang Liancheng, Guo Enqing, Liu Zhiqiang, Yi Xiaoyan, Wang Guohong. Electrical characteristics of a vertical light emitting diode with n-type contacts on a selectively wet-etching roughened surface[J]. Journal of Semiconductors, 2011, 32(2): 024009. doi: 10.1088/1674-4926/32/2/024009

Wang L C, Guo E Q, Liu Z Q, Yi X Y, Wang G H. Electrical characteristics of a vertical light emitting diode with n-type contacts on a selectively wet-etching roughened surface[J]. J. Semicond., 2011, 32(2): 024009. doi: 10.1088/1674-4926/32/2/024009.

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Received: 18 August 2015 Revised: 14 September 2010 Online: Published: 01 February 2011

Low resistance and thermally stable n-type contacts to N-polar GaN are essentially important for vertical light emitting diodes (VLEDs). The electrical characteristics of VLEDs with n-type contacts on a roughened and flat N-polar surface have been compared. VLEDs with contacts deposited on a roughened surface exhibit lower leakage currents yet a higher operating voltage. Based on this, a new scheme by depositing metallization contacts on a selectively wet-etching roughened surface has been developed. Excellent electrical and optical characteristics have been achieved with this method. An aging test further confirmed its stability.

Electrical characteristics of a vertical light emitting diode with n-type contacts on a selectively wet-etching roughened surface

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