Porous waveguide facilitated low divergence quantum cascade laser

Yin Wen; Lu Quanyong; Liu Wanfeng; Zhang Jinchuan; Wang Lijun; Liu Junqi; Li Lu; Liu Fengqi; Wang Zhanguo

doi:10.1088/1674-4926/32/6/064008

J. Semicond. > 2011, Volume 32 > Issue 6 > 064008

SEMICONDUCTOR DEVICES

Porous waveguide facilitated low divergence quantum cascade laser

Yin Wen, Lu Quanyong, Liu Wanfeng, Zhang Jinchuan, Wang Lijun, Liu Junqi, Li Lu, Liu Fengqi and Wang Zhanguo

+ Author Affiliations

Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China and Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

DOI: 10.1088/1674-4926/32/6/064008

Abstract: A quantum cascade laser with a porous waveguide structure emitting at 4.5 μm is reported. A branch-like porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process. In contrast to the common ridge waveguide laser, devices with a porous structure give rather better beam quality. Utilizing this porous structure as a high-order mode absorber, the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9^o.

Key words: quantum cascade laser

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Yin Wen, Lu Quanyong, Liu Wanfeng, Zhang Jinchuan, Wang Lijun, Liu Junqi, Li Lu, Liu Fengqi, Wang Zhanguo. Porous waveguide facilitated low divergence quantum cascade laser[J]. Journal of Semiconductors, 2011, 32(6): 064008. doi: 10.1088/1674-4926/32/6/064008

Yin W, Lu Q Y, Liu W F, Zhang J C, Wang L J, Liu J Q, Li L, Liu F Q, Wang Z G. Porous waveguide facilitated low divergence quantum cascade laser[J]. J. Semicond., 2011, 32(6): 064008. doi: 10.1088/1674-4926/32/6/064008.

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Received: 18 August 2015 Revised: 20 December 2010 Online: Published: 01 June 2011

A quantum cascade laser with a porous waveguide structure emitting at 4.5 μm is reported. A branch-like porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process. In contrast to the common ridge waveguide laser, devices with a porous structure give rather better beam quality. Utilizing this porous structure as a high-order mode absorber, the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9^o.

Porous waveguide facilitated low divergence quantum cascade laser

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