J. Semicond. > 2012, Volume 33 > Issue 3 > 033001

SEMICONDUCTOR MATERIALS

Investigation of an a-Si/c-Si interface on a c-Si(P) substrate by simulation

Wang Jianqiang, Gao Hua, Zhang Jian, Meng Fanying and Ye Qinghao

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DOI: 10.1088/1674-4926/33/3/033001

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Abstract: We investigate the recombination mechanism in an a-Si/c-Si interface, and analyze the key factors that influence the interface passivation quality, such as Qs, δp/δn and Dit. The polarity of the dielectric film is very important to the illustration level dependent passivation quality; when nδn=pδp and the defect level Et equal to Ei (c-Si), the defect states are the most effective recombination center, AFORS-HET simulation and analysis indicate that emitter doping and a-Si/c-Si band offset modulation are effective in depleting or accumulating one charged carrier. Interface states (Dit) severely deteriorate Voc compared with Jsc for a-Si/c-Si HJ cell performance when Dit is over 1 × 1010 cm-2·eV-1. For a c-Si(P)/a-Si(P+) structure, φBSF in c-Si and φ0 in a-Si have different performances in optimization contact resistance and c-Si(P)/a-Si(P+) interface recombination.

Keywords: a-Si/c-Si interface, a-Si emitter property, interface defect states

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    Received: 20 August 2015 Revised: 23 June 2011 Online: Published: 01 March 2012

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      Wang Jianqiang, Gao Hua, Zhang Jian, Meng Fanying, Ye Qinghao. Investigation of an a-Si/c-Si interface on a c-Si(P) substrate by simulation[J]. Journal of Semiconductors, 2012, 33(3): 033001. doi: 10.1088/1674-4926/33/3/033001 ****Wang J Q, Gao H, Zhang J, Meng F Y, Ye Q H. Investigation of an a-Si/c-Si interface on a c-Si(P) substrate by simulation[J]. J. Semicond., 2012, 33(3): 033001. doi: 10.1088/1674-4926/33/3/033001.
      Citation:
      Wang Jianqiang, Gao Hua, Zhang Jian, Meng Fanying, Ye Qinghao. Investigation of an a-Si/c-Si interface on a c-Si(P) substrate by simulation[J]. Journal of Semiconductors, 2012, 33(3): 033001. doi: 10.1088/1674-4926/33/3/033001 ****
      Wang J Q, Gao H, Zhang J, Meng F Y, Ye Q H. Investigation of an a-Si/c-Si interface on a c-Si(P) substrate by simulation[J]. J. Semicond., 2012, 33(3): 033001. doi: 10.1088/1674-4926/33/3/033001.

      Investigation of an a-Si/c-Si interface on a c-Si(P) substrate by simulation

      DOI: 10.1088/1674-4926/33/3/033001
      Funds:

      International Joint Foundation of Shanghai Science & Technology Commission with Applied Material (No.08520741400), Talent Foundation of Shanghai Science & Technology Commission (No.08XD14022)

      • Received Date: 2015-08-20
      • Accepted Date: 2011-06-23
      • Revised Date: 2011-06-23
      • Published Date: 2012-02-20

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