A substrate-free optical readout focal plane array with a heat sink structure

Ruiwen Liu; Yanmei Kong; Binbin Jiao; Zhigang Li; Haiping Shang; Dike Lu; Chaoqun Gao; Dapeng Chen; Qingchuan Zhang

doi:10.1088/1674-4926/34/2/024005

J. Semicond. > 2013, Volume 34 > Issue 2 > 024005

SEMICONDUCTOR DEVICES

A substrate-free optical readout focal plane array with a heat sink structure

Ruiwen Liu^{1, 2}, Yanmei Kong^{1, 2}, Binbin Jiao^{1, 2,}, Zhigang Li^{1, 2}, Haiping Shang^{1, 2}, Dike Lu^{1, 2}, Chaoqun Gao^{1, 2}, Dapeng Chen^{1, 2} and Qingchuan Zhang^{2, 3}

+ Author Affiliations

Corresponding author: Jiao Binbin, jiaobinb@ime.ac.cn

DOI: 10.1088/1674-4926/34/2/024005

Abstract: A substrate-free optical readout focal plane array (FPA) operating in 8-12 μm with a heat sink structure (HSS) was fabricated and its performance was tested. The temperature distribution of the FPA with an HSS investigated by using a commercial FLIR IR camera shows excellent uniformity. The thermal cross-talk effect existing in traditional substrate-free FPAs was eliminated effectively. The heat sink is fabricated successfully by electroplating copper, which provides high thermal capacity and high thermal conductivity, on the frame of substrate-free FPA. The FPA was tested in the optical-readout system, the results show that the response and NETD are 13.6 grey/K (F/#=0.8) and 588 mK, respectively.

Key words: infrared focal plane array, substrate-free, optical readout, heat sink structure

References

[1]	Grbovic D, Lavrik N V, Rajic S, et al. Arrays of SiO₂ substrate-free micromechanical uncooled infrared and terahertz detectors. J Appl Phys, 2008, 104:054508 doi: 10.1063/1.2959574
[2]	Barnes J R, Stephenson R J, Woodburn C N, et al. A femtojoule calorimeter using micromechanical sensors. Rev Sci Instrum, 1994, 65:3793 doi: 10.1063/1.1144509
[3]	Duan Z H, Zhang Q C, Wu X P, et al. Uncooled optically readable bimaterial micro-cantilever infrared imaging device. Chin Phys Lett, 2003, 20(12):2130 doi: 10.1088/0256-307X/20/12/012
[4]	Dong F L, Zhang Q C, Chen D P, et al. Optimized optomechanical micro-cantilever array for uncooled infrared imaging. Chin Phys Lett, 2007, 24(12):3362 doi: 10.1088/0256-307X/24/12/020
[5]	Wang X, Ma S L, Yu X M, et al. IR imaging using a cantilever-based focal plane array fabricated by deep reactive ion etching technique. Appl Phys Lett, 2007, 91:054109 doi: 10.1063/1.2768024
[6]	Grbovic D, Lavrik N V, Datskos P G, et al. Uncooled infrared imaging using bimaterial microcantilever arrays. Appl Phys Lett, 2006, 89:073118 doi: 10.1063/1.2337083
[7]	Oden P I, Datskos P G, Thundat T, et al. Uncooled thermal imaging using a piezoresistive microcantilever. Appl Phys Lett, 1996, 69(21):3277 doi: 10.1063/1.117309
[8]	Varesi J, Lai J, Shi Z, et al. Photothermal measurements at picowatt resolution using uncooled micro-optomechanical sensors. Appl Phys Lett, 1997, 71(3):306 doi: 10.1063/1.120440
[9]	Zhao Y, Mao M Y, Horowitz R, et al. Optomechanical uncooled infrared imaging system:design, microfabrication, and performance. J Microelectromech Syst, 2002, 11(2):136 doi: 10.1109/84.993448
[10]	Perazzo T, Mao M, Kwon O, et al. Infrared vision using uncooled micro-optomechanical camera. Appl Phys Lett, 1999, 74(23):3567 doi: 10.1063/1.124163
[11]	Cheng T, Zhang Q C, Jiao B B, et al. Analysis of optical readout sensitivity for uncooled infrared detector. Chin Phys Lett, 2009, 26(12):124206 doi: 10.1088/0256-307X/26/12/124206
[12]	Li C B, Jiao B B, Shi S L, et al. A novel uncooled substrate-free optical-readable infrared detector:design, fabrication and performance. Meas Sci Technol, 2006, 17:1981 doi: 10.1088/0957-0233/17/7/042
[13]	Li Chaobo, Jiao Binbin, Shi Shali, et al. A MEMS based focus plane array for infrared imaging. Chinese Journal of Semiconductors, 2006, 27(1):150 doi: 10.1007/s11460-007-0015-x
[14]	Jiao B B, Li C B, Chen D P, et al. A novel opto-mechanical uncooled infrared detector. Infrared Phys Technol, 2007, 51:66 doi: 10.1016/j.infrared.2006.10.035
[15]	Xiong Z M, Zhang Q C, Gao J, et al. The pressure-dependent performance of a substrate-free focal plane array in an uncooled infrared imaging system. J Appl Phys, 2007, 102:113524 doi: 10.1063/1.2822333
[16]	Cheng T, Zhang Q C, Wu X P, et al. Uncooled infrared imaging using a substrate-free focal-plane array. IEEE Electron Device Lett, 2008, 29(11):1218 doi: 10.1109/LED.2008.2004568
[17]	Dong F, Zhang Q, Chen D, et al. An uncooled optically readable infrared imaging detector. Sens Actuators A, 2007, 133:236 doi: 10.1016/j.sna.2006.04.031
[18]	Jiang Xingkai, Zhang Qingchuan, Shi Haitao, et al. Analysis of theoretical model of thermal infrared imager based on the substrate-free focal plane array. Acta Phys Sin, 2011, 60(5):054401(in Chinese) http://wulixb.iphy.ac.cn/EN/abstract/abstract18388.shtml
[19]	Cheng T, Zhang Q C, Chen D P, et al. Performance of an optimized substrate-free focal plane array for optical readout uncooled infrared detector. J Appl Phys, 2009, 105:034505 doi: 10.1063/1.3073986
[20]	Chen Dapeng, Ye Tianchun, Xie Changqing, et al. Stress in SiN_x film embedded with silicon nanocrystals preparing by LPCVD. Chinese Journal of Semiconductors, 2001, 22(12):1529(in Chinese)

Fig. 1. Infrared thermal imaging of the traditional substrate-free FPA

DownLoad: Full-Size Img PowerPoint

Fig. 2. Temperature distribution of substrate-free FPA both with and without an HSS simulated by FEM.

DownLoad: Full-Size Img PowerPoint

Fig. 3. 3D sketch map of a substrate-free FPA with HSS.

DownLoad: Full-Size Img PowerPoint

Fig. 4. Microfabrication process of HSS. (a) Ti/Au evaporation. (b) Photoresist photoetching. (c) Electroplating. (d) Corrosion and release.

DownLoad: Full-Size Img PowerPoint

Fig. 5. SEM photo of FPA with HSS.

DownLoad: Full-Size Img PowerPoint

Fig. 6. (a) Substrate-free FPA chip. (b) Temperature distribution of the substrate-free FPA without an HSS. (c) Temperature distribution of the substrate-free FPA with an HSS

DownLoad: Full-Size Img PowerPoint

Fig. 7. Schematic illustration of the proposed optical readout platform.

DownLoad: Full-Size Img PowerPoint

Fig. 8. (a) Imaging object and (b) thermal imaging of substrate-free FPA with an HSS.

DownLoad: Full-Size Img PowerPoint

[1]	Grbovic D, Lavrik N V, Rajic S, et al. Arrays of SiO₂ substrate-free micromechanical uncooled infrared and terahertz detectors. J Appl Phys, 2008, 104:054508 doi: 10.1063/1.2959574
[2]	Barnes J R, Stephenson R J, Woodburn C N, et al. A femtojoule calorimeter using micromechanical sensors. Rev Sci Instrum, 1994, 65:3793 doi: 10.1063/1.1144509
[3]	Duan Z H, Zhang Q C, Wu X P, et al. Uncooled optically readable bimaterial micro-cantilever infrared imaging device. Chin Phys Lett, 2003, 20(12):2130 doi: 10.1088/0256-307X/20/12/012
[4]	Dong F L, Zhang Q C, Chen D P, et al. Optimized optomechanical micro-cantilever array for uncooled infrared imaging. Chin Phys Lett, 2007, 24(12):3362 doi: 10.1088/0256-307X/24/12/020
[5]	Wang X, Ma S L, Yu X M, et al. IR imaging using a cantilever-based focal plane array fabricated by deep reactive ion etching technique. Appl Phys Lett, 2007, 91:054109 doi: 10.1063/1.2768024
[6]	Grbovic D, Lavrik N V, Datskos P G, et al. Uncooled infrared imaging using bimaterial microcantilever arrays. Appl Phys Lett, 2006, 89:073118 doi: 10.1063/1.2337083
[7]	Oden P I, Datskos P G, Thundat T, et al. Uncooled thermal imaging using a piezoresistive microcantilever. Appl Phys Lett, 1996, 69(21):3277 doi: 10.1063/1.117309
[8]	Varesi J, Lai J, Shi Z, et al. Photothermal measurements at picowatt resolution using uncooled micro-optomechanical sensors. Appl Phys Lett, 1997, 71(3):306 doi: 10.1063/1.120440
[9]	Zhao Y, Mao M Y, Horowitz R, et al. Optomechanical uncooled infrared imaging system:design, microfabrication, and performance. J Microelectromech Syst, 2002, 11(2):136 doi: 10.1109/84.993448
[10]	Perazzo T, Mao M, Kwon O, et al. Infrared vision using uncooled micro-optomechanical camera. Appl Phys Lett, 1999, 74(23):3567 doi: 10.1063/1.124163
[11]	Cheng T, Zhang Q C, Jiao B B, et al. Analysis of optical readout sensitivity for uncooled infrared detector. Chin Phys Lett, 2009, 26(12):124206 doi: 10.1088/0256-307X/26/12/124206
[12]	Li C B, Jiao B B, Shi S L, et al. A novel uncooled substrate-free optical-readable infrared detector:design, fabrication and performance. Meas Sci Technol, 2006, 17:1981 doi: 10.1088/0957-0233/17/7/042
[13]	Li Chaobo, Jiao Binbin, Shi Shali, et al. A MEMS based focus plane array for infrared imaging. Chinese Journal of Semiconductors, 2006, 27(1):150 doi: 10.1007/s11460-007-0015-x
[14]	Jiao B B, Li C B, Chen D P, et al. A novel opto-mechanical uncooled infrared detector. Infrared Phys Technol, 2007, 51:66 doi: 10.1016/j.infrared.2006.10.035
[15]	Xiong Z M, Zhang Q C, Gao J, et al. The pressure-dependent performance of a substrate-free focal plane array in an uncooled infrared imaging system. J Appl Phys, 2007, 102:113524 doi: 10.1063/1.2822333
[16]	Cheng T, Zhang Q C, Wu X P, et al. Uncooled infrared imaging using a substrate-free focal-plane array. IEEE Electron Device Lett, 2008, 29(11):1218 doi: 10.1109/LED.2008.2004568
[17]	Dong F, Zhang Q, Chen D, et al. An uncooled optically readable infrared imaging detector. Sens Actuators A, 2007, 133:236 doi: 10.1016/j.sna.2006.04.031
[18]	Jiang Xingkai, Zhang Qingchuan, Shi Haitao, et al. Analysis of theoretical model of thermal infrared imager based on the substrate-free focal plane array. Acta Phys Sin, 2011, 60(5):054401(in Chinese) http://wulixb.iphy.ac.cn/EN/abstract/abstract18388.shtml
[19]	Cheng T, Zhang Q C, Chen D P, et al. Performance of an optimized substrate-free focal plane array for optical readout uncooled infrared detector. J Appl Phys, 2009, 105:034505 doi: 10.1063/1.3073986
[20]	Chen Dapeng, Ye Tianchun, Xie Changqing, et al. Stress in SiN_x film embedded with silicon nanocrystals preparing by LPCVD. Chinese Journal of Semiconductors, 2001, 22(12):1529(in Chinese)

Search

GET CITATION

shu

Export: BibTex EndNote

Article Metrics

Article views: 2103 Times PDF downloads: 9 Times Cited by: 0 Times

History

Received: 17 July 2012 Revised: 24 August 2012 Online: Published: 01 February 2013

Article Navigation > Journal of Semiconductors > 2013 > 34(2): 024005

Ruiwen Liu, Yanmei Kong, Binbin Jiao, Zhigang Li, Haiping Shang, Dike Lu, Chaoqun Gao, Dapeng Chen, Qingchuan Zhang. A substrate-free optical readout focal plane array with a heat sink structure[J]. Journal of Semiconductors, 2013, 34(2): 024005. doi: 10.1088/1674-4926/34/2/024005 ****R W Liu, Y M Kong, B B Jiao, Z G Li, H P Shang, D K Lu, C Q Gao, D P Chen, Q C Zhang. A substrate-free optical readout focal plane array with a heat sink structure[J]. J. Semicond., 2013, 34(2): 024005. doi: 10.1088/1674-4926/34/2/024005.

Citation:

R W Liu, Y M Kong, B B Jiao, Z G Li, H P Shang, D K Lu, C Q Gao, D P Chen, Q C Zhang. A substrate-free optical readout focal plane array with a heat sink structure[J]. J. Semicond., 2013, 34(2): 024005. doi: 10.1088/1674-4926/34/2/024005.

Citation:

PDF( 6444 KB)

A substrate-free optical readout focal plane array with a heat sink structure

DOI: 10.1088/1674-4926/34/2/024005

1.
Integrated Circuit Advanced Process Center, Key Laboratory of Microelectronics Device and Integration Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
2.
Kunshan MicroOptica Electronic Co. Ltd, Kunshan 215300, China
3.
University of Science and Technology of China, Hefei 230027, China

Funds:

the Chinese Academy of Sciences Knowledge Innovation Project 07YF031001

the Natural Science Foundation of Jiangsu Province, China BK2012219

the Key Lab of Microelectronics Device and Integration Technology, China

Project supported by the Chinese Academy of Sciences Knowledge Innovation Project (No. 07YF031001), the Natural Science Foundation of Jiangsu Province, China (No. BK2012219), and the Key Lab of Microelectronics Device and Integration Technology, China

More Information

Corresponding author: Jiao Binbin, jiaobinb@ime.ac.cn
Received Date: 2012-07-17
Revised Date: 2012-08-24
Published Date: 2013-02-01

Abstract

Abstract

A substrate-free optical readout focal plane array (FPA) operating in 8-12 μm with a heat sink structure (HSS) was fabricated and its performance was tested. The temperature distribution of the FPA with an HSS investigated by using a commercial FLIR IR camera shows excellent uniformity. The thermal cross-talk effect existing in traditional substrate-free FPAs was eliminated effectively. The heat sink is fabricated successfully by electroplating copper, which provides high thermal capacity and high thermal conductivity, on the frame of substrate-free FPA. The FPA was tested in the optical-readout system, the results show that the response and NETD are 13.6 grey/K (F/#=0.8) and 588 mK, respectively.
- infrared focal plane array,
- substrate-free,
- optical readout,
- heat sink structure

FullText(HTML)

References(20)

References

[1]	Grbovic D, Lavrik N V, Rajic S, et al. Arrays of SiO₂ substrate-free micromechanical uncooled infrared and terahertz detectors. J Appl Phys, 2008, 104:054508 doi: 10.1063/1.2959574
[2]	Barnes J R, Stephenson R J, Woodburn C N, et al. A femtojoule calorimeter using micromechanical sensors. Rev Sci Instrum, 1994, 65:3793 doi: 10.1063/1.1144509
[3]	Duan Z H, Zhang Q C, Wu X P, et al. Uncooled optically readable bimaterial micro-cantilever infrared imaging device. Chin Phys Lett, 2003, 20(12):2130 doi: 10.1088/0256-307X/20/12/012
[4]	Dong F L, Zhang Q C, Chen D P, et al. Optimized optomechanical micro-cantilever array for uncooled infrared imaging. Chin Phys Lett, 2007, 24(12):3362 doi: 10.1088/0256-307X/24/12/020
[5]	Wang X, Ma S L, Yu X M, et al. IR imaging using a cantilever-based focal plane array fabricated by deep reactive ion etching technique. Appl Phys Lett, 2007, 91:054109 doi: 10.1063/1.2768024
[6]	Grbovic D, Lavrik N V, Datskos P G, et al. Uncooled infrared imaging using bimaterial microcantilever arrays. Appl Phys Lett, 2006, 89:073118 doi: 10.1063/1.2337083
[7]	Oden P I, Datskos P G, Thundat T, et al. Uncooled thermal imaging using a piezoresistive microcantilever. Appl Phys Lett, 1996, 69(21):3277 doi: 10.1063/1.117309
[8]	Varesi J, Lai J, Shi Z, et al. Photothermal measurements at picowatt resolution using uncooled micro-optomechanical sensors. Appl Phys Lett, 1997, 71(3):306 doi: 10.1063/1.120440
[9]	Zhao Y, Mao M Y, Horowitz R, et al. Optomechanical uncooled infrared imaging system:design, microfabrication, and performance. J Microelectromech Syst, 2002, 11(2):136 doi: 10.1109/84.993448
[10]	Perazzo T, Mao M, Kwon O, et al. Infrared vision using uncooled micro-optomechanical camera. Appl Phys Lett, 1999, 74(23):3567 doi: 10.1063/1.124163
[11]	Cheng T, Zhang Q C, Jiao B B, et al. Analysis of optical readout sensitivity for uncooled infrared detector. Chin Phys Lett, 2009, 26(12):124206 doi: 10.1088/0256-307X/26/12/124206
[12]	Li C B, Jiao B B, Shi S L, et al. A novel uncooled substrate-free optical-readable infrared detector:design, fabrication and performance. Meas Sci Technol, 2006, 17:1981 doi: 10.1088/0957-0233/17/7/042
[13]	Li Chaobo, Jiao Binbin, Shi Shali, et al. A MEMS based focus plane array for infrared imaging. Chinese Journal of Semiconductors, 2006, 27(1):150 doi: 10.1007/s11460-007-0015-x
[14]	Jiao B B, Li C B, Chen D P, et al. A novel opto-mechanical uncooled infrared detector. Infrared Phys Technol, 2007, 51:66 doi: 10.1016/j.infrared.2006.10.035
[15]	Xiong Z M, Zhang Q C, Gao J, et al. The pressure-dependent performance of a substrate-free focal plane array in an uncooled infrared imaging system. J Appl Phys, 2007, 102:113524 doi: 10.1063/1.2822333
[16]	Cheng T, Zhang Q C, Wu X P, et al. Uncooled infrared imaging using a substrate-free focal-plane array. IEEE Electron Device Lett, 2008, 29(11):1218 doi: 10.1109/LED.2008.2004568
[17]	Dong F, Zhang Q, Chen D, et al. An uncooled optically readable infrared imaging detector. Sens Actuators A, 2007, 133:236 doi: 10.1016/j.sna.2006.04.031
[18]	Jiang Xingkai, Zhang Qingchuan, Shi Haitao, et al. Analysis of theoretical model of thermal infrared imager based on the substrate-free focal plane array. Acta Phys Sin, 2011, 60(5):054401(in Chinese) http://wulixb.iphy.ac.cn/EN/abstract/abstract18388.shtml
[19]	Cheng T, Zhang Q C, Chen D P, et al. Performance of an optimized substrate-free focal plane array for optical readout uncooled infrared detector. J Appl Phys, 2009, 105:034505 doi: 10.1063/1.3073986
[20]	Chen Dapeng, Ye Tianchun, Xie Changqing, et al. Stress in SiN_x film embedded with silicon nanocrystals preparing by LPCVD. Chinese Journal of Semiconductors, 2001, 22(12):1529(in Chinese)

A substrate-free optical readout focal plane array with a heat sink structure

References

Search

GET CITATION

Share:

Article Metrics

History

Catalog

Email This Article

A substrate-free optical readout focal plane array with a heat sink structure

DOI: 10.1088/1674-4926/34/2/024005

Abstract

References

Proportional views

Catalog

A substrate-free optical readout focal plane array with a heat sink structure

References

Search

GET CITATION

Share:

Article Metrics

History

Catalog

Email This Article

A substrate-free optical readout focal plane array with a heat sink structure

DOI: 10.1088/1674-4926/34/2/024005

Abstract

References

Proportional views

Catalog

Export File

Citation

Format

Content