J. Semicond. > 2016, Volume 37 > Issue 2 > 021001

INVITED REVIEW PAPERS

Surface acoustic wave devices for sensor applications

Bo Liu1, 2, Xiao Chen1, 2, Hualin Cai1, 2, Mohammad Ali Mohammad1, 2, Xiangguang Tian1, 2, Luqi Tao1, 2, Yi Yang1, 2 and Tianling Ren1, 2,

+ Author Affiliations

 Corresponding author: Tianling Ren, Email: RenTL@tsinghua.edu.cn

DOI: 10.1088/1674-4926/37/2/021001

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Abstract: Surface acoustic wave (SAW) devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.

Key words: surface acoustic wave, sensor, sensor application



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Fig. 1.  Two kinds of SAW devices.

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Fig. 2.  (Color online) Schematic of the operating principle of a SAW-based radio-link temperature measurement system. (Redrawn from Reference [45]).

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Fig. 3.  Temperature compensation using an additional SAW and mixer.

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Fig. 4.  (Color online) Two kinds of SAW pressure sensor structures.

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Fig. 5.  (Color online) Schematic view of a wireless chemical sensor system (Redrawn from Reference [71]).

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Fig. 6.  (Color online) Structure of Love mode SAW device.

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Table 1.   TCF and sound velocity of traditional surface acoustic wave materials.

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Table 2.   TCF of different materials and different structures.

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    Received: 14 October 2015 Revised: Online: Published: 01 February 2016

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      Article Navigation >  Journal of Semiconductors  > 2016  >  37(2): 021001
      Bo Liu, Xiao Chen, Hualin Cai, Mohammad Ali Mohammad, Xiangguang Tian, Luqi Tao, Yi Yang, Tianling Ren. Surface acoustic wave devices for sensor applications[J]. Journal of Semiconductors, 2016, 37(2): 021001. doi: 10.1088/1674-4926/37/2/021001 ****B Liu, X Chen, H L Cai, M A Mohammad, X G Tian, L Q Tao, Y Yang, T L Ren. Surface acoustic wave devices for sensor applications[J]. J. Semicond., 2016, 37(2): 021001. doi: 10.1088/1674-4926/37/2/021001.
      Citation:
      Bo Liu, Xiao Chen, Hualin Cai, Mohammad Ali Mohammad, Xiangguang Tian, Luqi Tao, Yi Yang, Tianling Ren. Surface acoustic wave devices for sensor applications[J]. Journal of Semiconductors, 2016, 37(2): 021001. doi: 10.1088/1674-4926/37/2/021001 ****
      B Liu, X Chen, H L Cai, M A Mohammad, X G Tian, L Q Tao, Y Yang, T L Ren. Surface acoustic wave devices for sensor applications[J]. J. Semicond., 2016, 37(2): 021001. doi: 10.1088/1674-4926/37/2/021001.
      shu

      Surface acoustic wave devices for sensor applications

      DOI: 10.1088/1674-4926/37/2/021001
      • 1.

        Institute of Microelectronics, Tsinghua University, Beijing 100084, China

      • 2.

        Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China

      Funds:

      Project supported by the National Natural Science Foundation of China (Nos. 60936002, 61025021, 61434001, 61574083), the State Key Development Program for Basic Research of China (No. 2015CB352100), the National Key Project of Science and Technology (No. 2011ZX02403-002) and the Special Fund for Agroscientific Research in the Public Interest of China (No. 201303107). M.A.M is additionally supported by the Postdoctoral Fellowship (PDF) program of the Natural Sciences and Engineering Research Council (NSERC) of Canada and the China Postdoctoral Science Foundation (CPSF).

      More Information
      • Corresponding author: Email: RenTL@tsinghua.edu.cn
      • Received Date: 2015-10-14
      • Published Date: 2016-01-25

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