J. Semicond. > 2020, Volume 41 > Issue 10 > 102402
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A snapback-free and high-speed SOI LIGBT with double trenches and embedded fully NPN structure

Chenxia Wang, Jie Wei, Diao Fan, Yang Yang and Xiaorong Luo

+ Author Affiliations

 Corresponding author: Jie Wei, Email: weijieuestc@uestc.edu.cn; Xiaorong Luo, xrluo@uestc.edu.cn

DOI: 10.1088/1674-4926/41/10/102402

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Abstract: A novel 600 V snapback-free high-speed silicon-on-insulator lateral insulated gate bipolar transistor is proposed and investigated by simulation. The proposed device features an embedded NPN structure at the anode side, and double trenches together with an N-type carrier storage (N-CS) layer at the cathode side, named DT-NPN LIGBT. The NPN structure not only acts as an electron barrier to eliminate the snapback effect in the on-state within a smaller cell pitch but also provides an extra electron extracting path during the turn-off stage to decrease the turnoff loss (Eoff). The double cathode trenches and N-CS layer hinder the hole from being extracted by the cathode quickly. They then enhance carrier storing effect and lead to a reduced on-state voltage drop (Von). The latch-up immunity is improved by the double cathode trenches. Hence, the DT-NPN LIGBT obtains a superior tradeoff between the Von and Eoff. Additionally, the DT-NPN LIGBT exhibits an improved blocking capability and weak dependence of breakdown voltage (BV) on the P+ anode doping concentration because the NPN structure suppresses triggering the PNP transistor. The proposed LIGBT reduces the Eoff by 55% at the same Von, and improves the BV by 7.3% compared to the conventional LIGBT.

Key words: snapback-free, fast switching, SOI LIGBT, trench gate, Eoff



[1]
Iwamuro N, Laska T. IGBT history, state-of-the-art, and future prospects. IEEE Trans Electron Devices, 2017, 64, 741 doi: 10.1109/TED.2017.2654599
[2]
Disney D, Letavic T, Trajkovic T, et al. High-voltage integrated circuits: History, state of the art, and future prospects. IEEE Trans Electron Devices, 2017, 64, 659 doi: 10.1109/TED.2016.2631125
[3]
Hu H, Huang H M, Chen X B. A novel double-RESURF SOI lateral TIGBT with self-biased nMOS for improved VCE(sat)–Eoff tradeoff relationship. IEEE Trans Electron Devices, 2019, 66, 814 doi: 10.1109/TED.2018.2878474
[4]
Green D W, Sweet M, Vershinin K V, et al. Performance analysis of the segment npn anode LIGBT. IEEE Trans Electron Devices, 2005, 52, 2482 doi: 10.1109/TED.2005.857168
[5]
Chen W S, Zhang B, Li Z J. Area-efficient fast-speed lateral IGBT with a 3-D n-region-controlled anode. IEEE Electron Device Lett, 2010, 31, 467 doi: 10.1109/LED.2010.2043638
[6]
Sun W F, Zhu J, Yang Z, et al. A composite structure named self-adjusted conductivity modulation SOI-LIGBT with low on-state voltage. 2017 29th International Symposium on Power Semiconductor Devices and IC's (ISPSD), 2017, 85
[7]
Duan B X, Sun L C, Yang Y T. Analysis of the novel snapback-free LIGBT with fast-switching and improved latch-up immunity by TCAD simulation. IEEE Electron Device Lett, 2019, 40, 63 doi: 10.1109/LED.2018.2881289
[8]
Luo X R, Zhao Z Y, Huang L H, et al. A snapback-free fast-switching SOI LIGBT with an embedded self-biased n-MOS. IEEE Trans Electron Devices, 2018, 65, 3572 doi: 10.1109/TED.2018.2842092
[9]
Matsudai T, Kitagawa M, Nakagawa A. A trench-gate injection enhanced lateral IEGT on SOI. Proceedings of International Symposium on Power Semiconductor Devices and IC's, 1995, 141
[10]
Zhang L, Zhu J, Sun W F, et al. A U-shaped channel SOI-LIGBT with dual trenches. IEEE Trans Electron Devices, 2017, 64, 2587 doi: 10.1109/TED.2017.2696258
[11]
Zhang L, Zhu J, Sun W F, et al. Comparison of short-circuit characteristics of trench gate and planar gate U-shaped channel SOI-LIGBTs. Solid-State Electron, 2017, 135, 24 doi: 10.1016/j.sse.2017.06.009
[12]
Simpson M R. Analysis of negative differential resistance in the I–V characteristics of shorted-anode LIGBT's. IEEE Trans Electron Devices, 1991, 38, 1633 doi: 10.1109/16.85160
[13]
Chul J H, Byeon D S, Oh J K, et al. A fast-switching SOI SA-LIGBT without NDR region. 12th International Symposium on Power Semiconductor Devices & ICs, 2000, 149
[14]
Sin J K O, Mukherjee S. Lateral insulated-gate bipolar transistor (LIGBT) with a segmented anode structure. IEEE Electron Device Lett, 1991, 12, 45 doi: 10.1109/55.75699
[15]
Zhou K, Sun T, Liu Q, et al. A snapback-free shorted-anode SOI LIGHT with multi-segment anode. 2017 29th International Symposium on Power Semiconductor Devices and IC's, 2017, 315
[16]
Zhang L, Zhu J, Sun W F, et al. A high current density SOI-LIGBT with segmented trenches in the anode region for suppressing negative differential resistance regime. 2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD), 2015, 49
[17]
TCAD Sentaurus device manual. Synopsys, Inc., Mountain View, CA, USA, 2013
[18]
Takahashi H, Haruguchi H, Hagino H, et al. Carrier stored trench-gate bipolar transistor (CSTBT) – A novel power device for high voltage application. 8th International Symposium on Power Semiconductor Devices and ICs, 1996, 349
[19]
He Y T, Qiao M, Zhang B. Ultralow turnoff loss dual-gate SOI LIGBT with trench gate barrier and carrier stored layer. Chin Phys B, 2016, 25, 127304 doi: 10.1088/1674-1056/25/12/127304
[20]
Sun T, Luo X R, Wei J, et al. A carrier stored SOI LIGBT with ultralow ON-state voltage and high current capability. IEEE Trans Electron Devices, 2018, 65, 3365 doi: 10.1109/TED.2018.2848468
[21]
Luo X R, Yang Y, Sun T, et al. A snapback-free and low-loss shorted-anode SOI LIGBT with self-adaptive resistance. IEEE Trans Electron Devices, 2019, 66, 1390 doi: 10.1109/TED.2019.2892068
Fig. 1.  (Color online) Schematic cross-sectional views of (a) DT-NPN LIGBT, (b) SEG LTIGBT, and (c) SSA LTIGBT.

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Fig. 2.  (Color online) Equivalent circuit of the DT-NPN LIGBT. Rp-body and Rp are distributed resistance at the cathode and anode region, respectively.

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Fig. 3.  (Color online) (a) Dependences of the BV and Von on NA. (b) Breakdown characteristics. Here Ie and Ih represent the electron current and hole current, respectively.

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Fig. 4.  (Color online) Snapback characteristics for different devices. Wp/Wn is the width of P+/N+ anode. ΔVSB is snapback voltage.

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Fig. 5.  (Color online) Total current density distribution and the flowlines for (a) the proposed LIGBT (at point A in Fig. 4), (b) the SEG LTIGBT (at point C in Fig. 4), and (c) the SSA LTIGBT (at point B in Fig. 4).

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Fig. 6.  (Color online) Influences of the Np and Dp on (a) forward conduction characteristics at VG = 15 V, (b) conduction energy band distribution of P-well/N-buffer junction in the y-direction and (c) ΔVSB, Von and Eoff. qψH and WH are the height and width of electron barrier. To entirely suppress the snapback by optimizing the Np and Dp, the qψH is about 0.75 eV.

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Fig. 7.  (Color online) Forward conduction characteristics. Insets: hole density distribution for different LIGBTs at the cathode side (@ y = 4.1 μm) and schematic cross-sectional views of four different cathode structures for LIGBTs with the same anode structure as that of the proposed DT-NPN LIGBT.

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Fig. 8.  (Color online) Switching characteristics: (a) switching waves, the inset shows the simulation circuit with RG = 10 Ω and LS = 10 nH, (b) carrier distribution at different time, (c) current flowlines through the embedded NPN structure at t3.

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Fig. 9.  (Color online) IA–VA characteristics for the DT-NPN and MSA LIGBT.

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Fig. 10.  (Color online) Eoff–Von tradeoff of different LIGBTs.

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Fig. 11.  (Color online) Key fabrication steps. (a) N-buffer and N-CS-layer implantations. (b) P-well and P-body implantations. (c) Trenches etching, oxidation, and poly-silicon deposition. (d) Implantations for N+/P+ regions and formation of metal contacts.

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Table 1.   Key parameters for LIGBTs.

ParameterDT-NPNSEGSSA
N-drift length, Ld (μm)545454
SOI layer thickness, Ts (μm)252525
Buried oxide thickness, tbox (μm)333
N-drift doping, Nd (1014 cm−3)222
N-buffer doping, Nbuffer (1016 cm−3)626
N-CS doping, Ncs (1016 cm−3)666
P-body doping, Np-body (1017 cm−3)111
Gate oxide thickness (μm)0.10.10.1
Trench depth (μm)444
DownLoad: CSV
[1]
Iwamuro N, Laska T. IGBT history, state-of-the-art, and future prospects. IEEE Trans Electron Devices, 2017, 64, 741 doi: 10.1109/TED.2017.2654599
[2]
Disney D, Letavic T, Trajkovic T, et al. High-voltage integrated circuits: History, state of the art, and future prospects. IEEE Trans Electron Devices, 2017, 64, 659 doi: 10.1109/TED.2016.2631125
[3]
Hu H, Huang H M, Chen X B. A novel double-RESURF SOI lateral TIGBT with self-biased nMOS for improved VCE(sat)–Eoff tradeoff relationship. IEEE Trans Electron Devices, 2019, 66, 814 doi: 10.1109/TED.2018.2878474
[4]
Green D W, Sweet M, Vershinin K V, et al. Performance analysis of the segment npn anode LIGBT. IEEE Trans Electron Devices, 2005, 52, 2482 doi: 10.1109/TED.2005.857168
[5]
Chen W S, Zhang B, Li Z J. Area-efficient fast-speed lateral IGBT with a 3-D n-region-controlled anode. IEEE Electron Device Lett, 2010, 31, 467 doi: 10.1109/LED.2010.2043638
[6]
Sun W F, Zhu J, Yang Z, et al. A composite structure named self-adjusted conductivity modulation SOI-LIGBT with low on-state voltage. 2017 29th International Symposium on Power Semiconductor Devices and IC's (ISPSD), 2017, 85
[7]
Duan B X, Sun L C, Yang Y T. Analysis of the novel snapback-free LIGBT with fast-switching and improved latch-up immunity by TCAD simulation. IEEE Electron Device Lett, 2019, 40, 63 doi: 10.1109/LED.2018.2881289
[8]
Luo X R, Zhao Z Y, Huang L H, et al. A snapback-free fast-switching SOI LIGBT with an embedded self-biased n-MOS. IEEE Trans Electron Devices, 2018, 65, 3572 doi: 10.1109/TED.2018.2842092
[9]
Matsudai T, Kitagawa M, Nakagawa A. A trench-gate injection enhanced lateral IEGT on SOI. Proceedings of International Symposium on Power Semiconductor Devices and IC's, 1995, 141
[10]
Zhang L, Zhu J, Sun W F, et al. A U-shaped channel SOI-LIGBT with dual trenches. IEEE Trans Electron Devices, 2017, 64, 2587 doi: 10.1109/TED.2017.2696258
[11]
Zhang L, Zhu J, Sun W F, et al. Comparison of short-circuit characteristics of trench gate and planar gate U-shaped channel SOI-LIGBTs. Solid-State Electron, 2017, 135, 24 doi: 10.1016/j.sse.2017.06.009
[12]
Simpson M R. Analysis of negative differential resistance in the I–V characteristics of shorted-anode LIGBT's. IEEE Trans Electron Devices, 1991, 38, 1633 doi: 10.1109/16.85160
[13]
Chul J H, Byeon D S, Oh J K, et al. A fast-switching SOI SA-LIGBT without NDR region. 12th International Symposium on Power Semiconductor Devices & ICs, 2000, 149
[14]
Sin J K O, Mukherjee S. Lateral insulated-gate bipolar transistor (LIGBT) with a segmented anode structure. IEEE Electron Device Lett, 1991, 12, 45 doi: 10.1109/55.75699
[15]
Zhou K, Sun T, Liu Q, et al. A snapback-free shorted-anode SOI LIGHT with multi-segment anode. 2017 29th International Symposium on Power Semiconductor Devices and IC's, 2017, 315
[16]
Zhang L, Zhu J, Sun W F, et al. A high current density SOI-LIGBT with segmented trenches in the anode region for suppressing negative differential resistance regime. 2015 IEEE 27th International Symposium on Power Semiconductor Devices & IC's (ISPSD), 2015, 49
[17]
TCAD Sentaurus device manual. Synopsys, Inc., Mountain View, CA, USA, 2013
[18]
Takahashi H, Haruguchi H, Hagino H, et al. Carrier stored trench-gate bipolar transistor (CSTBT) – A novel power device for high voltage application. 8th International Symposium on Power Semiconductor Devices and ICs, 1996, 349
[19]
He Y T, Qiao M, Zhang B. Ultralow turnoff loss dual-gate SOI LIGBT with trench gate barrier and carrier stored layer. Chin Phys B, 2016, 25, 127304 doi: 10.1088/1674-1056/25/12/127304
[20]
Sun T, Luo X R, Wei J, et al. A carrier stored SOI LIGBT with ultralow ON-state voltage and high current capability. IEEE Trans Electron Devices, 2018, 65, 3365 doi: 10.1109/TED.2018.2848468
[21]
Luo X R, Yang Y, Sun T, et al. A snapback-free and low-loss shorted-anode SOI LIGBT with self-adaptive resistance. IEEE Trans Electron Devices, 2019, 66, 1390 doi: 10.1109/TED.2019.2892068

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    Received: 02 January 2020 Revised: 04 May 2020 Online: Accepted Manuscript: 23 June 2020Uncorrected proof: 24 June 2020Published: 01 October 2020

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      Article Navigation >  Journal of Semiconductors  > 2020  >  41(10): 102402
      Chenxia Wang, Jie Wei, Diao Fan, Yang Yang, Xiaorong Luo. A snapback-free and high-speed SOI LIGBT with double trenches and embedded fully NPN structure[J]. Journal of Semiconductors, 2020, 41(10): 102402. doi: 10.1088/1674-4926/41/10/102402 ****C X Wang, J Wei, D Fan, Y Yang, X R Luo, A snapback-free and high-speed SOI LIGBT with double trenches and embedded fully NPN structure[J]. J. Semicond., 2020, 41(10): 102402. doi: 10.1088/1674-4926/41/10/102402.
      Citation:
      Chenxia Wang, Jie Wei, Diao Fan, Yang Yang, Xiaorong Luo. A snapback-free and high-speed SOI LIGBT with double trenches and embedded fully NPN structure[J]. Journal of Semiconductors, 2020, 41(10): 102402. doi: 10.1088/1674-4926/41/10/102402 ****
      C X Wang, J Wei, D Fan, Y Yang, X R Luo, A snapback-free and high-speed SOI LIGBT with double trenches and embedded fully NPN structure[J]. J. Semicond., 2020, 41(10): 102402. doi: 10.1088/1674-4926/41/10/102402.
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      A snapback-free and high-speed SOI LIGBT with double trenches and embedded fully NPN structure

      DOI: 10.1088/1674-4926/41/10/102402

      • China State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China

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