Mobility enhancement techniques for Ge and GeSn MOSFETs

Ran Cheng; Zhuo Chen; Sicong Yuan; Mitsuru Takenaka; Shinichi Takagi; Genquan Han; Rui Zhang

doi:10.1088/1674-4926/42/2/023101

J. Semicond. > 2021, Volume 42 > Issue 2 > 023101

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Mobility enhancement techniques for Ge and GeSn MOSFETs

Ran Cheng¹, Zhuo Chen¹, Sicong Yuan¹, Mitsuru Takenaka³, Shinichi Takagi³, Genquan Han² and Rui Zhang^1,

+ Author Affiliations

1. School of Micro-Nano Electronics, Zhejiang University, Hangzhou 310058, China
2. State Key Discipline Laboratory of Wide Bandgap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China
3. School of Engineering, Tokyo University, Yayoi 2-11-16, Tokyo 113-8656, Japan

Author Bio:

Ran Cheng received the B.Eng. and Ph.D degrees in Electrical Engineering from National University of Singapore, Singapore in 2009 and 2014, respectively. From late 2014, she joined School of Microelectronics, Zhejiang University. Her research interests include strain engineering, device modelling, fast and cyrogenic characterization for advanced transistors. She has authored and co-authored over 50 publications. She is currently an Associate Professor with Zhejiang University, China.

Zhuo Chen received the B.E. degree in materials science and engineering from Nanjing University of Aeronautics and Astronautics, Nanjing, China, in 2018. He is currently pursuing the M.E. degree with the School of Microelectronics, Zhejiang University, Hangzhou, China. He is currently engaged in the researches on Ge channel MOSFETs technology.

Mitsuru Takenaka was born in Kobe, Japan, in 1975. He received his B.E., M.E., and Ph.D. degrees in electronic engineering from the University of Tokyo, Japan, in 1998, 2000, and 2003, respectively. He is with the Department of Electrical Engineering and Information Systems, the University of Tokyo as a full professor. His research interests presently focus on the heterogeneous integration of III-V/Ge/2D materials on a Si platform for electronic-photonic integrated circuits.

Shinichi Takagi was born in Tokyo, Japan, on August 25, 1959. He received the B.S., M.S. and Ph.D. degrees in electronic engineering from the University of Tokyo, Tokyo, Japan, in 1982, 1984 and 1987, respectively. He joined the Toshiba Research and Development Center, Japan, in 1987. From 1993 to 1995, he was a Visiting Scholar at Stanford University. In October 2003, he moved to the University of Tokyo, where he is currently working as a professor in the department of Electrical Engineering and Information Systems. His recent interests include the science and the technologies of advanced CMOS devices.

Genquan Han received the B. Eng degree from Tsinghua University, Beijing, in 2003, and the Ph.D. degree from the Institute of Semiconductors, Chinese Academy of Sciences, Beijing, in 2008. He was a research fellow in National University of Singapore, from 2008 to 2013. In 2013, he joined College of Optoelectronic Engineering, Chongqing University. He is currently a Professor with the School of Microelectronics, Xidian University. His current research interests include high-mobility non-silicon MOSFETs, steep-slope field-effect transistors, novel non-volatile field-effect transistors, and Ga2O3 power devices.

Rui Zhang received the B.E. and M.E. degrees in materials science and engineering from Tsinghua University, Beijing, China, in 2006 and 2009, respectively, and the Ph.D. degree in electrical engineering from The University of Tokyo, Tokyo, Japan, in 2012. He is currently an Associate Professor with the Institute of Micro- and Nano-Electronics, Zhejiang University, Hangzhou, China. His current research interests include high mobility channel MOSFETs, novel computing devices and MOS structured sensor devices.

Corresponding author: Rui Zhang, ruizhang@zju.edu.cn

DOI: 10.1088/1674-4926/42/2/023101

Abstract: The performance enhancement of conventional Si MOSFETs through device scaling is becoming increasingly difficult. The application of high mobility channel materials is one of the most promising solutions to overcome the bottleneck. The Ge and GeSn channels attract a lot of interest as the alternative channel materials, not only because of the high carrier mobility but also the superior compatibility with typical Si CMOS technology. In this paper, the recent progress of high mobility Ge and GeSn MOSFETs has been investigated, providing feasible approaches to improve the performance of Ge and GeSn devices for future CMOS technologies.

Key words: germanium, germanium-tin, MOSFET, mobility

References

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Fig. 1. (Color online) The fabrication process of the high-k/GeO_x/Ge gate stacks with PPO method.

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Fig. 2. (Color online) The AR-XPS spectra taken from an 1-nm-thick Al₂O₃/Ge structure with 650 W PPO for 10 s.

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Fig. 3. (Color online) (a) The C–V characteristics of an Au/Al₂O₃ (1 nm)/GeO_x (1.2 nm)/Ge MOS capacitor fabricated with the PPO method. (b) The D_it at the Al₂O₃/Ge MOS interfaces w/ and w/o PPO treatment.

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Fig. 4. (Color online) The D_it at E_i – 0.2 eV taken from PPO Al₂O₃/GeO_x/Ge MOS interfaces fabricated with different Al₂O₃ capping thickness, plasma power and oxidation time.

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Fig. 5. (Color online) (a) The C–V curves of the Au/HfO₂/p-Ge MOS capacitors w/ and w/o PPO, compared with that of Au/Al₂O₃/GeO_x/p-Ge MOS capacitor. (b) The C–V curves of of the Au/HfO₂/Al₂O₃/p-Ge MOS capacitor after PPO. The inset of it shows the energy distribution of D_it of this MOS capacitor.

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Fig. 6. The cross section TEM image of an HfO₂ (2.2 nm)/Al₂O₃ (0.2 nm)/Ge structure after 15 s’ PPO using 500 W plasma.

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Fig. 7. (Color online) The D_it at the energy of E_i – 0.2 eV of the HfO₂/Al₂O₃/GeO_x/Ge and Al₂O₃/GeO_x/Ge gate stacks, as a function of EOT.

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Fig. 8. (Color online) The schematic illusion of the ozone post oxidation process.

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Fig. 9. Cross section TEM of an HfO₂ (2 nm)/Al₂O₃ (0.3 nm)/Ge structure after OPO for 60 s at 300 °C.

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Fig. 10. (Color online) The EOT of the OPO HfO₂/Al₂O₃/GeO_x/Ge gate stacks with different Al₂O₃ thicknesses and OPO times.

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Fig. 11. (Color online) The D_it at the energy of E_i – 0.2 eV in OPO HfO₂/Al₂O₃/GeO_x gate stacks, compared with the PPO gate stacks as a function of EOT.

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Fig. 12. (Color online) The oxide thickness of the PPO and OPO gate stacks at side wall and top regions of a 3D structured Ge channel.

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Fig. 13. (Color online) The fabrication process of the Ge MOSFETs with OPO HfO₂/Al₂O₃/GeO_x gate stacks.

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Fig. 14. (Color online) The I_d–V_d (a) and I_d–V_g (b) characteristics of an (100)/<110> HfO₂/Al₂O₃/GeO_x/Ge pMOSFET fabricated by 60 s OPO.

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Fig. 15. (Color online) The hole mobility in HfO₂/Al₂O₃/GeO_x/Ge pMOSFET fabricated by OPO with different oxidation times, compared with that in the HfO₂/Al₂O₃/Ge pMOSFET.

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Fig. 16. (Color online) The mechanism of suppressed carrier scattering in the Si passivated GeSn channel, compared with the direct oxide/GeSn channel.

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Fig. 17. The cross section TEM image of a GeSn MOS structure having the Si passivation.

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Fig. 18. (Color online) (a) I_d–V_g and (b) I_d–V_d characteristics of the (100) GeSn QW pMOSFET with Si passivation.

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Fig. 19. (Color online) The hole mobility in the Si passivated GeSn QW pMOSFETs with different channel orientations of (100), (110) and (111).

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Fig. 20. (Color online) The comparison of (a) I_d–V_d curves, (b) G_m curves and (c) hole mobility of GeSn QW pMOSFETs with different Sn contents of 2.7%, 4.0% and 7.5%.

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Fig. 21. (Color online) The equienergy contours of heavy hole sub-band for GeSn pMOSFETs with different Sn contents of 2.7%, 4.0% and 7.5%, at a N_s of 5 × 10¹² cm^–2. The equienergy contour lines are for multiples of 20 meV.

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[2]	Auth C, Aliyarukunju A, Asoro M, et al. A 10 nm high performance and low-power CMOS technology featuring 3rd generation FinFET transistors, self-aligned quad patterning, contact over active gate and cobalt local interconnects. IEDM Tech Dig, 2017, 29.1 doi: 10.1109/IEDM.2017.8268472
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[8]	Shang H, Frank M M, Gusev E P, et al. Germanium channel MOSFETs: Opportunities and challenges. IBM J Res Dev, 2006, 50(4/5), 377 doi: 10.1147/rd.504.0377
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[11]	Gong X, Han G Q, Bai F, et al. Germanium-tin (GeSn) p-channel MOSFETs fabricated on (100) and (111) surface orientations with sub-400 ^oC Si₂H₆ passivation. IEEE Electron Device Lett, 2013, 34(3), 339 doi: 10.1109/LED.2012.2236880
[12]	Lieten R R, Maeda T, Jevasuwan W, et al. Tensile-strained GeSn metal-oxide-semiconductor field-effect transistor devices on Si (111) using solid phase epitaxy. Appl Phys Exp, 2013, 6(10), 101301 doi: 10.7567/apex.6.101301
[13]	Xie R, Phung T H, He W, et al. High mobility high-k/Ge pMOSFETs with 1 nm EOT – New concept on interface engineering and interface characterization. IEDM Tech Dig, 2008, 393 doi: 10.1109/IEDM.2008.4796703
[14]	Mitard J, Shea C, DeJaeger B, et al. Impact of EOT scaling down to 0.85 nm on 70 nm Ge-pFETs technology with STI. VLSI Symp Tech Dig, 2009, 82
[15]	Kamata Y, Ikeda K, Kamimuta Y, et al. High-k/Ge p- & n-MISFETs with strontium germanide interlayer for EOT scalable CMIS application. VLSI Symp Tech Dig, 2009, 211 doi: 10.1109/VLSIT.2010.5556231
[16]	Gupta S, Vincent B, Yang B, et al. Towards high mobility GeSn channel nMOSFETs: Improved surface passivation using novel ozone oxidation method. IEDM Tech Dig, 2012, 16.2 doi: 10.1109/IEDM.2012.6479052
[17]	Liu L, Liang R R, Wang J, et al. Hole mobility enhancement of GeSn/Ge pMOSFETs with an interlayer formed by Sn-assisted oxynitridation. ECS Solid State Lett, 2014, 3(11), Q76 doi: 10.1149/2.0071411ssl
[18]	Haffner T, Mahjoub M A, Labau S, et al. Improvement of the electrical performance of Au/Ti/HfO₂/Ge_0.9Sn_0.1 p-MOS capacitors by using interfacial layers. Appl Phys Lett, 2019, 115(17), 171601 doi: 10.1063/1.5121474
[19]	Nakakita Y, Nakane R, Sasada T, et al. Interface-controlled self-align source/drain Ge p-channel metal-oxide-semiconductor field-effect transistors fabricated using thermally oxidized GeO₂ interfacial layers. Jpn J Appl Phys, 2011, 50(1), 010109 doi: 10.1109/IEDM.2008.4796838
[20]	Morii K, Iwasaki T, Nakane R, et al. High performance GeO₂/Ge nMOSFETs with source/drain junctions formed by gas phase doping. IEEE Electron Device Lett, 2010, 31(10), 1092 doi: 10.1109/LED.2010.2061211
[21]	Lee C H, Nishimura T, Tabata T, et al. Ge MOSFETs performance: Impact of Ge interface passivation. IEDM Tech Dig, 2010, 416 doi: 10.1109/IEDM.2010.5703384
[22]	Zhang R, Iwasaki T, Taoka N, et al. Al₂O₃/GeO_x/Ge gate stacks with low interface trap density fabricated by electron cyclotron resonance plasma postoxidation. Appl Phys Lett, 2011, 98(11), 112902 doi: 10.1063/1.3564902
[23]	Zhang R, Iwasaki T, Taoka N, et al. Impact of GeO_x interfacial layer thickness on Al₂O₃/Ge MOS interface properties. Microelectron Eng, 2011, 88(7), 1533 doi: 10.1016/j.mee.2011.03.130
[24]	Zhang R, Iwasaki T, Taoka N, et al. High-mobility Ge pMOSFET with 1-nm-thick EOT Al₂O₃/GeO_x/Ge gate stack fabricated by plasma post oxidation. IEEE Trans Electron Devices, 2012, 59(2), 335 doi: 10.1109/TED.2011.2176495
[25]	Zhang R, Huang P C, Lin J C, et al. High-mobility Ge p- and n-MOSFET with 0.7-nm EOT using HfO₂/Al₂O₃/GeO_x/Ge gate stacks fabricated by plasma postoxidation. IEEE Trans Electron Devices, 2013, 60(3), 927 doi: 10.1109/TED.2013.2238942
[26]	Taoka N, Ikeda K, Yamashita Y, et al. Quantitative evaluation of interface trap density in Ge-MIS interfaces. Ext Abst SSDM, 2006, 396 doi: 10.7567/SSDM.2006.J-6-1
[27]	Matsubara H, Kumagai H, Sugahara S, et al. Evaluation of SiO₂/GeO₂/Ge MIS interface properties by low temperature conductance method. Ext Abst SSDM, 2007, 18 doi: 10.7567/SSDM.2007.A-2-1
[28]	Martens K, Jaeger B D, Bonzom R, et al. New interface state density extraction method applicable to peaked and high-density distributions for Ge MOSFET development. IEEE Electron Device Lett, 2006, 27(5), 405 doi: 10.1109/LED.2006.873767
[29]	Brews J R. Rapid interface parameterization using a single MOS conductance curve. Solid-State Electron, 1983, 26(8), 711 doi: 10.1016/0038-1101(83)90030-8
[30]	Smith G S, Isaacs P B. The crystal structure of quartz-like GeO₂. Acta Cryst, 1964, 17(7), 842 doi: 10.1107/S0365110X64002262
[31]	Van Elshocht S, Caymax M, Conard T, et al. Effect of hafnium germinate formation on the interface of HfO₂/germanium metal oxide semiconductor devices. Appl Phys Lett, 2006, 88(14), 141904 doi: 10.1063/1.2192576
[32]	Houssa M, Pourtois G, Caymax M, et al. First-principles study of the structural and electronic properties of (100) Ge/Ge(M)O₂ interfaces (M = Al, La, or Hf). Appl Phys Lett, 2008, 92(24), 242101 doi: 10.1016/j.jeurceramsoc.2007.12.036
[33]	Migita S, Watanabe Y, Ota H, et al. Design and demonstration of very high-k (k similar to 50) HfO₂ for ultra-scaled Si CMOS. VLSI Symp Tech Dig, 2008, 119 doi: 10.1109/VLSIT.2008.4588599
[34]	Tsipas P, Volkos S N, Sotiropoulos A, et al. Germanium-induced stabilization of a very high-k zirconia phase in ZrO₂/GeO₂ gate stacks. Appl Phys Lett, 2008, 93(8), 082904 doi: 10.1063/1.2977555
[35]	Tsoutsou D, Apostolopoulos G, Galata S, et al. Stabilization of a very high-k tetragonal ZrO₂ phase by direct doping with germanium. Microelectron Eng, 2009, 86(7–9), 1626 doi: 10.1016/j.mee.2009.02.037
[36]	Oshima Y, Shandalov M, Sun Y, et al. Hafnium oxide/germanium oxynitride gate stacks on germanium: Capacitance scaling and interface state density. Appl Phys Lett, 2009, 94(18), 183102 doi: 10.1063/1.3116624
[37]	Fu C H, Chang-Liao K S, Liu L J, et al. An ultralow EOT Ge MOS device with tetragonal HfO₂ and high quality Hf_xGe_yO interfacial layer. IEEE Trans Electron Devices, 2014, 61(8), 2662 doi: 10.1109/TED.2014.2329839
[38]	Han G, Su S, Zhan C, Zhou Q, et al. High-mobility germanium-tin (GeSn) p-channel MOSFETs featuring metallic source/drain and sub-370 ^oC process modules. IEDM Tech Dig, 2011, 402 doi: 10.1109/IEDM.2011.6131569
[39]	Gupta S, Huang Y C, Kim Y, et al. Hole enhancement in compressively strained Ge_0.93Sn_0.07 pMOSFETs. IEEE Electron Device Lett, 2013, 34(7), 58 doi: 10.1109/LED.2013.2259573
[40]	Liu M, Han G, Liu Y, et al. Undoped Ge_0.92Sn_0.08 quantum well pMOSFETs on (001), (011) and (111) substrates with in situ Si₂H₆ passivation: High hole mobility and dependence of performance on orientation. VLSI Symp Tech Dig, 2014, 100 doi: 10.1109/VLSIT.2014.6894376
[41]	Mizuno T, Takagi S, Sugiyama N, et al. Electron and hole mobility enhancement in strained-Si MOSFET's on SiGe-on-insulator substrates fabricated by SIMOX technology. IEEE Electron Device Lett, 2000, 21(5), 230 doi: 10.1109/55.841305
[42]	Thompson S E, Armstrong M, Auth C, et al. A 90-nm logic technology featuring strained-silicon. IEEE Trans Electron Device, 2004, 51(11), 1790 doi: 10.1109/TED.2004.836648
[43]	Lee M L, Fitzgerald E A, Bulsara M T, et al. Strained Si, and Ge channels for high-mobility metal –oxide –semiconductor field-effect transistors. J Appl Phys, 2005, 97(1), 011101 doi: 10.1063/1.1819976
[44]	Nakaharai S, Tezuka T, Sugiyama N, et al. Characterization of 7-nm-thick strained Ge-on-insulator layer fabricated by Ge-condensation technique. Appl Phys Phys, 2003, 83(17), 3516 doi: 10.1063/1.1622442
[45]	Krishnamohan T, Krivokapic Z, Uchida K, et al. High-mobility ultrathin strained Ge MOSFETs on bulk and SOI with low band-to-band tunneling leakage: Experiments. IEEE Trans Electron Devices, 2006, 53(5), 990 doi: 10.1109/ted.2006.872362
[46]	Gupta S, Magyari-Kope B, Nishi Y, et al. Achieving direct band gap in germanium through integration of Sn alloying and external strain. J Appl Phys, 2014, 113(7), 073707 doi: 10.1063/1.4792649
[47]	Yang Y, Low K L, Wang W, et al. Germanium-tin n-channel tunneling field-effect transistor: Device physics and simulation study. J Appl Phys, 2013, 113(19), 194507 doi: 10.1063/1.4805051

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Received: 22 September 2020 Revised: 02 December 2020 Online: Accepted Manuscript: 16 December 2020Uncorrected proof: 17 December 2020Published: 08 February 2021

Article Navigation > Journal of Semiconductors > 2021 > 42(2): 023101

Ran Cheng, Zhuo Chen, Sicong Yuan, Mitsuru Takenaka, Shinichi Takagi, Genquan Han, Rui Zhang. Mobility enhancement techniques for Ge and GeSn MOSFETs[J]. Journal of Semiconductors, 2021, 42(2): 023101. doi: 10.1088/1674-4926/42/2/023101 ****R Cheng, Z Chen, S C Yuan, M Takenaka, S Takagi, G Q Han, R Zhang, Mobility enhancement techniques for Ge and GeSn MOSFETs[J]. J. Semicond., 2021, 42(2): 023101. doi: 10.1088/1674-4926/42/2/023101.

Citation:

Ran Cheng, Zhuo Chen, Sicong Yuan, Mitsuru Takenaka, Shinichi Takagi, Genquan Han, Rui Zhang. Mobility enhancement techniques for Ge and GeSn MOSFETs[J]. Journal of Semiconductors, 2021, 42(2): 023101. doi: 10.1088/1674-4926/42/2/023101 ****

R Cheng, Z Chen, S C Yuan, M Takenaka, S Takagi, G Q Han, R Zhang, Mobility enhancement techniques for Ge and GeSn MOSFETs[J]. J. Semicond., 2021, 42(2): 023101. doi: 10.1088/1674-4926/42/2/023101.

Citation:

R Cheng, Z Chen, S C Yuan, M Takenaka, S Takagi, G Q Han, R Zhang, Mobility enhancement techniques for Ge and GeSn MOSFETs[J]. J. Semicond., 2021, 42(2): 023101. doi: 10.1088/1674-4926/42/2/023101.

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Mobility enhancement techniques for Ge and GeSn MOSFETs

DOI: 10.1088/1674-4926/42/2/023101

1.
School of Micro-Nano Electronics, Zhejiang University, Hangzhou 310058, China
2.
State Key Discipline Laboratory of Wide Bandgap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China
3.
School of Engineering, Tokyo University, Yayoi 2-11-16, Tokyo 113-8656, Japan

More Information

Ran Cheng：received the B.Eng. and Ph.D degrees in Electrical Engineering from National University of Singapore, Singapore in 2009 and 2014, respectively. From late 2014, she joined School of Microelectronics, Zhejiang University. Her research interests include strain engineering, device modelling, fast and cyrogenic characterization for advanced transistors. She has authored and co-authored over 50 publications. She is currently an Associate Professor with Zhejiang University, China
Zhuo Chen：received the B.E. degree in materials science and engineering from Nanjing University of Aeronautics and Astronautics, Nanjing, China, in 2018. He is currently pursuing the M.E. degree with the School of Microelectronics, Zhejiang University, Hangzhou, China. He is currently engaged in the researches on Ge channel MOSFETs technology
Mitsuru Takenaka：was born in Kobe, Japan, in 1975. He received his B.E., M.E., and Ph.D. degrees in electronic engineering from the University of Tokyo, Japan, in 1998, 2000, and 2003, respectively. He is with the Department of Electrical Engineering and Information Systems, the University of Tokyo as a full professor. His research interests presently focus on the heterogeneous integration of III-V/Ge/2D materials on a Si platform for electronic-photonic integrated circuits
Shinichi Takagi：was born in Tokyo, Japan, on August 25, 1959. He received the B.S., M.S. and Ph.D. degrees in electronic engineering from the University of Tokyo, Tokyo, Japan, in 1982, 1984 and 1987, respectively. He joined the Toshiba Research and Development Center, Japan, in 1987. From 1993 to 1995, he was a Visiting Scholar at Stanford University. In October 2003, he moved to the University of Tokyo, where he is currently working as a professor in the department of Electrical Engineering and Information Systems. His recent interests include the science and the technologies of advanced CMOS devices
Genquan Han：received the B. Eng degree from Tsinghua University, Beijing, in 2003, and the Ph.D. degree from the Institute of Semiconductors, Chinese Academy of Sciences, Beijing, in 2008. He was a research fellow in National University of Singapore, from 2008 to 2013. In 2013, he joined College of Optoelectronic Engineering, Chongqing University. He is currently a Professor with the School of Microelectronics, Xidian University. His current research interests include high-mobility non-silicon MOSFETs, steep-slope field-effect transistors, novel non-volatile field-effect transistors, and Ga2O3 power devices
Rui Zhang：received the B.E. and M.E. degrees in materials science and engineering from Tsinghua University, Beijing, China, in 2006 and 2009, respectively, and the Ph.D. degree in electrical engineering from The University of Tokyo, Tokyo, Japan, in 2012. He is currently an Associate Professor with the Institute of Micro- and Nano-Electronics, Zhejiang University, Hangzhou, China. His current research interests include high mobility channel MOSFETs, novel computing devices and MOS structured sensor devices
Corresponding author: ruizhang@zju.edu.cn
Received Date: 2020-09-22
Revised Date: 2020-12-02
Published Date: 2021-02-10

Abstract

Abstract

The performance enhancement of conventional Si MOSFETs through device scaling is becoming increasingly difficult. The application of high mobility channel materials is one of the most promising solutions to overcome the bottleneck. The Ge and GeSn channels attract a lot of interest as the alternative channel materials, not only because of the high carrier mobility but also the superior compatibility with typical Si CMOS technology. In this paper, the recent progress of high mobility Ge and GeSn MOSFETs has been investigated, providing feasible approaches to improve the performance of Ge and GeSn devices for future CMOS technologies.
- germanium,
- germanium-tin,
- MOSFET,
- mobility

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References(47)

References

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[47]	Yang Y, Low K L, Wang W, et al. Germanium-tin n-channel tunneling field-effect transistor: Device physics and simulation study. J Appl Phys, 2013, 113(19), 194507 doi: 10.1063/1.4805051

Mobility enhancement techniques for Ge and GeSn MOSFETs

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