J. Semicond. > 2022, Volume 43 > Issue 12 > 124101, doi: 10.1088/1674-4926/43/12/124101

ARTICLES

Humidity sensor based on BiOBr synthesized under ambient condition

Chaofan Cao1, , Guixian Xiao1 and Yao Lu2,

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 Corresponding author: Chaofan Cao, workchaofan@163.com; Yao Lu, yaolu@mail.tsinghua.edu.cn

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Abstract: Flexible humidity sensors are effective portable devices for human respiratory monitoring. However, the current preparation of sensitive materials need harsh terms and the small production output limits their practicability. Here, we report a synthesis method of single-crystal BiOBr nanosheets under room temperature and atmospheric pressure based on a sonochemical strategy. A flexible humidity sensor enabled by BiOBr nanosheets deliver efficient sensing performance, a high humidity sensitivity (Ig/I0 = 550%) with relative humidity from 40% to 100%, an excellent selectivity, and a detection response/recovery time of 11 and 6 s, respectively. The flexible humidity sensor shows a potential application value as a wearable monitoring device for respiratory disease prevention and health monitoring.

Key words: human breathing, BiOBr nanosheets, sonochemical strategy, flexible humidity sensor



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[12]
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[18]
Zhu P, Liu Y, Fang Z, et al. Flexible and highly sensitive humidity sensor based on cellulose nanofibers and carbon nanotube composite film. Langmuir, 2019, 35(14), 4834 doi: 10.1021/acs.langmuir.8b04259
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[22]
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[23]
Yu H, Huang H, Xu K, et al. Liquid-phase exfoliation into monolayered BiOBr nanosheets for photocatalytic oxidation and reduction. ACS Sustaine Chem Eng, 2017, 5(11), 10499 doi: 10.1021/acssuschemeng.7b02508
[24]
Peng Y, Xu J, Liu T, et al. Controlled synthesis of one-dimensional BiOBr with exposed (110) facets and enhanced photocatalytic activity. CrystEngComm, 2017, 19(43), 6473 doi: 10.1039/C7CE01452J
Fig. 1.  (Color online) Schematic illustration on growing BiOBr nanostructures under ultrasonic treatment.

DownLoad: Full-Size Img PowerPoint
Fig. 2.  (Color online) (a) Spin coating photoresist on PET substrate. (b) UV exposure under interdigital electrode patterned mask. (c) Develop the exposed PET substrate. (d) Thermal evaporation 60 nm Au electrode. (e) Acetone stripping to form interpolation gold electrode.

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Fig. 3.  (Color online) (a) SEM image of Bi powder. (b, c) SEM images of BiOBr nanostructure under different magnifications. (d) Typical XRD pattern of BiOBr nanostructure. (e) Raman spectrum of BiOBr nanostructure excited at 532 nm. (f) HRTEM images of BiOBr nanostructure，the down-left insets are the lattice fringes.

DownLoad: Full-Size Img PowerPoint
Fig. 4.  (Color online) (a) XPS survey scan of BiOBr nanostructure. (b–d) High-resolution XPS spectra of Bi 4f, Br 3d and O 1s of BiOBr, respectively.

DownLoad: Full-Size Img PowerPoint
Fig. 5.  (Color online) (a) Schematic illustration of a humidity sensor based on BiOBr nanostructure. (b) Time-dependent variation of relative current change of device under various concentrations of relative humidity. (c) Relative current change of sensor under different humidity relative to 0% humidity. (d) Response and recovery of the humidity sensor exposed to 90%. (e) Relative current changes of the humidity sensor under cyclic run between ambient humidity and 90% RH. (f) For the influence of other gases on the performance of humidity sensor, the relative humidity of the test environment is 40% RH, and the gas concentration is 100 ppm.

DownLoad: Full-Size Img PowerPoint
Fig. 6.  (Color online) (a) The application of a humidity sensor in human respiratory monitoring is intelligent mask. (b) Photos of humidity sensors. (c) Response of the sensor under various breathing modes. (d–f) The smart mask's response under different breathing rates.

DownLoad: Full-Size Img PowerPoint
[1]
Rolfe S. The importance of respiratory rate monitoring. Brit J Nurs, 2019, 28(8), 504 doi: 10.12968/bjon.2019.28.8.504
[2]
Jonkman A H, De Vries H J, Heunks L M A. Physiology of the respiratory drive in ICU patients: implications for diagnosis and treatment. Crit Care, 2020, 24(1), 1 doi: 10.1186/s13054-019-2683-3
[3]
Bigatello L, Pesenti A. Respiratory physiology for the anesthesiologist. Anesthesiology, 2019, 130(6), 1064 doi: 10.1097/ALN.0000000000002666
[4]
McCafferty J. Respiratory heat and moisture loss in health, asthma and chronic obstructive pulmonary disease (COPD). University of Edinburgh, 2006
[5]
Sylvester K P, Youngs L, Rutter M A, et al. Early respiratory diagnosis: benefits of enhanced lung function assessment. BMJ Open Respir Res, 2021, 8(1), e001012 doi: 10.1136/bmjresp-2021-001012
[6]
Baldo T A, de Lima L F, Mendes L F, et al. Wearable and biodegradable sensors for clinical and environmental applications. ACS Appl Electron Mater, 2020, 3(1), 68 doi: 10.1021/acsaelm.0c00735
[7]
Lu Y, Xu K, Zhang L, et al. Multimodal plant healthcare flexible sensor system. ACS Nano, 2020, 14(9), 10966 doi: 10.1021/acsnano.0c03757
[8]
Li B, Xiao G, Liu F, et al. A flexible humidity sensor based on silk fabrics for human respiration monitoring. J Mater Chem C, 2018, 6(16), 4549 doi: 10.1039/C8TC00238J
[9]
Peng B, Zhao F, Ping J, et al. Recent Advances in nanomaterial‐enabled wearable sensors: Material synthesis, sensor design, and personal health monitoring. Small, 2020, 16(44), 2002681 doi: 10.1002/smll.202002681
[10]
Leng X, Wang Y, Wang F. Alcohols assisted hydrothermal synthesis of defect-rich MoS2 and their applications in humidity sensing. Adv Mater Interfaces, 2019, 6(11), 1900010 doi: 10.1002/admi.201900010
[11]
Al-Sehemi A G, Al-Assiri M S, Kalam A, et al. Sensing performance optimization by tuning surface morphology of organic (D-π-A) dye based humidity sensor. Sens Actuators B, 2016, 231, 30 doi: 10.1016/j.snb.2016.03.004
[12]
Lu Y, Xu K, Yang M Q, et al. Highly stable Pd/HNb3O8-based flexible humidity sensor for perdurable wireless wearable applications. Nanoscale Horiz, 2021, 6(3), 260 doi: 10.1039/D0NH00594K
[13]
Wang Y F, Sekine T, Takeda Y, et al. Fully printed PEDOT: PSS-based temperature sensor with high humidity stability for wireless healthcare monitoring. Sci Rep, 2020, 10(1), 1 doi: 10.1038/s41598-019-56847-4
[14]
Bae Y M, Lee Y H, Kim H S, et al. Polyimide-polyurethane/urea block copolymers for highly sensitive humidity sensor with low hysteresis. J Appl Polym Sci, 2017, 134(24), 44973 doi: 10.1002/app.44973
[15]
Farahani H, Wagiran R, Hamidon M N. Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review. Sensors, 2014, 14(5), 7881 doi: 10.3390/s140507881
[16]
An H, Habib T, Shah S, et al. Water sorption in MXene/polyelectrolyte multilayers for ultrafast humidity sensing. ACS Appl Nano Mater, 2019, 2(2), 948 doi: 10.1021/acsanm.8b02265
[17]
Leng X, Luo D, Xu Z, et al. Modified graphene oxide/Nafion composite humidity sensor and its linear response to the relative humidity. Sens Actuators B, 2018, 257, 372 doi: 10.1016/j.snb.2017.10.174
[18]
Zhu P, Liu Y, Fang Z, et al. Flexible and highly sensitive humidity sensor based on cellulose nanofibers and carbon nanotube composite film. Langmuir, 2019, 35(14), 4834 doi: 10.1021/acs.langmuir.8b04259
[19]
Yang J, Shi R, Lou Z, et al. Flexible smart noncontact control systems with ultrasensitive humidity sensors. Small, 2019, 15(38), 1902801 doi: 10.1002/smll.201902801
[20]
Wang S, Chen Z, Umar A, et al. Supramolecularly modified graphene for ultrafast responsive and highly stable humidity sensor. J Phys Chem C, 2015, 119(51), 28640 doi: 10.1021/acs.jpcc.5b08771
[21]
Zhao J, Li N, Yu H, et al. Highly sensitive MoS2 humidity sensors array for noncontact sensation. Adv Mater, 2017, 29(34), 1702076 doi: 10.1002/adma.201702076
[22]
Vadivel S, Vanitha M, Muthukrishnaraj A, et al. Graphene oxide–BiOBr composite material as highly efficient photocatalyst for degradation of methylene blue and rhodamine-B dyes. J Water Proc Eng, 2014, 1, 17 doi: 10.1016/j.jwpe.2014.02.003
[23]
Yu H, Huang H, Xu K, et al. Liquid-phase exfoliation into monolayered BiOBr nanosheets for photocatalytic oxidation and reduction. ACS Sustaine Chem Eng, 2017, 5(11), 10499 doi: 10.1021/acssuschemeng.7b02508
[24]
Peng Y, Xu J, Liu T, et al. Controlled synthesis of one-dimensional BiOBr with exposed (110) facets and enhanced photocatalytic activity. CrystEngComm, 2017, 19(43), 6473 doi: 10.1039/C7CE01452J

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    Received: 30 June 2022 Revised: 25 July 2022 Online: Accepted Manuscript: 08 September 2022Uncorrected proof: 08 September 2022Published: 02 December 2022

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      Article Navigation >  Journal of Semiconductors  > 2022  >  43(12): 124101
      Chaofan Cao, Guixian Xiao, Yao Lu. Humidity sensor based on BiOBr synthesized under ambient condition[J]. Journal of Semiconductors, 2022, 43(12): 124101. doi: 10.1088/1674-4926/43/12/124101 ****Chaofan Cao, Guixian Xiao, Yao Lu. 2022: Humidity sensor based on BiOBr synthesized under ambient condition. Journal of Semiconductors, 43(12): 124101. doi: 10.1088/1674-4926/43/12/124101
      Citation:
      Chaofan Cao, Guixian Xiao, Yao Lu. Humidity sensor based on BiOBr synthesized under ambient condition[J]. Journal of Semiconductors, 2022, 43(12): 124101. doi: 10.1088/1674-4926/43/12/124101 ****
      Chaofan Cao, Guixian Xiao, Yao Lu. 2022: Humidity sensor based on BiOBr synthesized under ambient condition. Journal of Semiconductors, 43(12): 124101. doi: 10.1088/1674-4926/43/12/124101
      shu

      Humidity sensor based on BiOBr synthesized under ambient condition

      doi: 10.1088/1674-4926/43/12/124101
      • 1.

        Second Affiliated Hospital, Shenyang Medical College, Shenyang 110035, China

      • 2.

        State Key Laboratory of Automotive Safety and Energy, School of Vehicle and Mobility, Tsinghua University, Beijing 100084, China

      More Information
      • Chaofan Cao：got his M.S degree in 2018 at China Medical University. Then he joined the Respiratory Department of the Second Affiliated Hospital of Shenyang Medical College as an attending physician. His research interests include chronic airway disease, lung function, and respiratory endoscopy
      • Guixian Xiao：graduated from the Medical School of Tongji University in 1989. Head of respiratory Department of the Second Affiliated Hospital of Shenyang Medical College. Her research interests include bronchial asthma and chronic obstructive pulmonary disease
      • Yao Lu：got his M.S and Ph.D. degree in 2020 at the University of Science and Technology Beijing. Then he joined the State Key Laboratory of Automotive Safety and Energy at Tsinghua University as an assistant research fellow. His research interests include smart lithium-ion batteries and smart cell sensors
      • Corresponding author: workchaofan@163.com; yaolu@mail.tsinghua.edu.cn
      • Received Date: 2022-06-30
      • Revised Date: 2022-07-25
        • Available Online: 2022-09-08

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